precursor changes

J Provine jprovine at stanford.edu
Thu Feb 24 18:59:26 PST 2011


hello all,
the ammonia line has been cleared the source bottle turned off in
preparation for adding an O2 filter on that line.  elmer will have to weld a
fitting for this change so i will update everyone as soon as i know the
timeline.

additionally, the request for some different chemistries means there is a
need for some precursor swapping.  i would like to make the following
proposal:
removing the zirconium precursor on wednesday march 2 in the morning to be
replaced with diethy-zinc for ZnO films.
then on monday march 14, swapping the zinc precursor out for the Yttrium
precursor.

if this causes problems in your fabrication plans, please let me know.
j
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