From jprovine at stanford.edu Mon Jan 3 15:12:53 2011 From: jprovine at stanford.edu (J Provine) Date: Mon, 3 Jan 2011 15:12:53 -0800 Subject: ALD updates (savannah, fiji-l, and fiji-r) In-Reply-To: References: Message-ID: Hello all, happy new year. a brief update on ald in the snf before the lab comes back online tomorrow morning. *Savannah* The chamber clean has not been completed yet. the new backplate to enclose the pump and precursor region for the savannah also needs to be installed. jim haydon and i were not able to get these completed over the holiday shutdown, as such the savannah will stay offline for this week (january 4-9) but is scheduled to be tested and released for use on monday morning the 10th. your patience with this short extension of the shutdown is appreciated. also in this week, i pledge to complete the update to the savannah wiki page to incorporate the excellent data from last quarter's EE412 group and some other improvements in the materials for the system. I'll send out another email once i finish the update. I highly encourage all users and potential users to (re)read the material carefully and thoroughly. *Fiji* The county fire marshall received our latest and most thorough permit request on December 14. they promise a response in 15 business days, so depending on how many days of vacation they county takes around Christmas and New Years we should be hearing back very soon and I'll update this list again with that news. In the meantime, I'm finishing up some early Fiji documentation for the snf website. if the permit is granted we have an inspection and acceptance test to preform before beginning user training and process development. as the information arrives i'll keep everyone apprised with quick updates. *EE412* if you or any students you know would be interested in ALD development projects through EE412 in the winter quarter, please get ahold of me asap. I would like to have the projects organized as soon as possible. Thank you. questions are always welcome. J -------------- next part -------------- An HTML attachment was scrubbed... URL: From oguz.h.elibol at intel.com Wed Jan 5 11:30:25 2011 From: oguz.h.elibol at intel.com (Elibol, Oguz H) Date: Wed, 5 Jan 2011 11:30:25 -0800 Subject: Shadowing Message-ID: <88D294E28D20D84C9350E231A79B0E630147D84B4E@orsmsx506.amr.corp.intel.com> Hi All, Could you please let me know if you are planning to use the Savannah in the next couple of weeks and don't mind me shadowing you? Thanks! Oguz -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Fri Jan 14 15:47:02 2011 From: jprovine at stanford.edu (J Provine) Date: Fri, 14 Jan 2011 15:47:02 -0800 Subject: Savannah use tomorrow In-Reply-To: <418576420.243388.1295037775635.JavaMail.root@zm09.stanford.edu> References: <418576420.243388.1295037775635.JavaMail.root@zm09.stanford.edu> Message-ID: eager savannah users, et al, the savannah chamber did not return from quantum clean at noon as originally indicated. i just got off the phone with quantum clean and they said the chamber cannot be delivered until monday morning. (i offered to pick it up, but the stance was it is not ready until monday morning.) the receiving staff is out, but i'll be here to get the chamber and install it on the savannah monday morning. after assembly, i'll leak check, bake out, and run test wafers. if each of those steps goes off without a hitch the system will be ready early tuesday morning. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Mon Jan 17 16:28:23 2011 From: jprovine at stanford.edu (J Provine) Date: Mon, 17 Jan 2011 16:28:23 -0800 Subject: savannah chamber reinstall update: bad news i'm afraid Message-ID: the chamber returned from cleaning today (monday) at 4pm. i was beginning installation when one of the two substrate heater connection bolts broke. it had been bent even before we did removed the chamber for cleaning and it snapped while tightening the nut on reinstall. i've contacted cambridge nanotech for the fastest and best resolution to this problem. i'll update as soon as i know anything new. on the plus side the chamber looks immaculate post cleaning and had no visible residue when given an organics clean wipe down. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Wed Jan 19 10:47:47 2011 From: jprovine at stanford.edu (J Provine) Date: Wed, 19 Jan 2011 10:47:47 -0800 Subject: savannah update Message-ID: hi all, cambridge nanotech sent a replacement part for the substrate heater overnight. it arrived just now. i'm in meetings most of the day, but i'll grab time in the snf when i can to start assembling the chamber. this is the sequence of events: 1) install new substrate heater 2) assemble chamber 3) leak check (first with system pump and then with He leak checker 4) bake out (this is several hours) to get the chamber hot and drive off moisture that collected. 5) test deposition (thursday morning) 6) release the tool to others & start training the backlog of new users (be willing to let the new users shadow you - they will also be shadowing me for the test runs) of course each step has to be successful for the next step to be enacted. i'll keep you updated as this progresses. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Jan 20 15:43:01 2011 From: jprovine at stanford.edu (J Provine) Date: Thu, 20 Jan 2011 15:43:01 -0800 Subject: savannah update In-Reply-To: References: Message-ID: hi everyone, from the list below here is the update. 1) install new substrate heater (DONE) 2) assemble chamber (DONE) 3) leak check system pump (DONE) and He leak checked (DONE) 4) bake out (CURRENTLY ONGOING) still to come 5) test deposition unfortunately there is an issue with the connection on one of the substrate heaters. jim haydon and i were able to work out a temporary solution that i believe is ok. i'll be checking the system throughout bake out and get info from cambridge nanotech to make sure our solution is feasible. i am not comfortable with leaving the system unattended in its current state and will not release it to users as is. i know some folks are up against some tough time crunches and so unless i found out our current heater solution is not functioning, i will help people run the system until a permanent fix can be figured out. however, i am away at the MEMS conference from sunday morning until thursday evening and if a solution can not be found before i leave the system will be left offline in my absence until a permanent solution can be figured out. so starting this evening at 10pm and running until saturday at 10pm is 48 hours of potential deposition. remember the tool has just come back online so a test deposition is not just recommended but required for whatever film you are running. respond to this email requesting slots letting me know what deposition you need and the urgency and available times. for those awaiting training, it does not make sense to me to train you on the tool in its current state. i am sorry for the continued delay, but i believe everyone would prefer a functioning and safe system instead of just one they can use. since the only remaining problem is this one heater, i am hopeful that this can be resolved asap. more updates as they become available. j On Wed, Jan 19, 2011 at 10:47 AM, J Provine wrote: > hi all, > cambridge nanotech sent a replacement part for the substrate heater > overnight. it arrived just now. i'm in meetings most of the day, but i'll > grab time in the snf when i can to start assembling the chamber. this is > the sequence of events: > > 1) install new substrate heater > 2) assemble chamber > 3) leak check (first with system pump and then with He leak checker > 4) bake out (this is several hours) to get the chamber hot and drive off > moisture that collected. > 5) test deposition (thursday morning) > 6) release the tool to others & start training the backlog of new users (be > willing to let the new users shadow you - they will also be shadowing me for > the test runs) > > of course each step has to be successful for the next step to be enacted. > i'll keep you updated as this progresses. > j > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Jan 20 17:19:46 2011 From: jprovine at stanford.edu (J Provine) Date: Thu, 20 Jan 2011 17:19:46 -0800 Subject: savannah update In-Reply-To: References: Message-ID: daesung lee and i are running HfO2 thursday night/friday morning. so if others need that material a test deposition will already be done by early tomorrow morning. also a possible solution has arisen for fixing the heater connection. if it is successful everything will be back to normal friday. if not, then it is back to the short-term solution. j On Thu, Jan 20, 2011 at 3:43 PM, J Provine wrote: > hi everyone, > from the list below here is the update. > 1) install new substrate heater (DONE) > 2) assemble chamber (DONE) > 3) leak check system pump (DONE) and He leak checked (DONE) > 4) bake out (CURRENTLY ONGOING) > still to come > 5) test deposition > > unfortunately there is an issue with the connection on one of the substrate > heaters. jim haydon and i were able to work out a temporary solution that i > believe is ok. i'll be checking the system throughout bake out and get info > from cambridge nanotech to make sure our solution is feasible. i am not > comfortable with leaving the system unattended in its current state and will > not release it to users as is. i know some folks are up against some tough > time crunches and so unless i found out our current heater solution is not > functioning, i will help people run the system until a permanent fix can be > figured out. > > however, i am away at the MEMS conference from sunday morning until > thursday evening and if a solution can not be found before i leave the > system will be left offline in my absence until a permanent solution can be > figured out. > > so starting this evening at 10pm and running until saturday at 10pm is 48 > hours of potential deposition. remember the tool has just come back online > so a test deposition is not just recommended but required for whatever film > you are running. respond to this email requesting slots letting me know > what deposition you need and the urgency and available times. > > for those awaiting training, it does not make sense to me to train you on > the tool in its current state. i am sorry for the continued delay, but i > believe everyone would prefer a functioning and safe system instead of just > one they can use. since the only remaining problem is this one heater, i am > hopeful that this can be resolved asap. > > more updates as they become available. > j > > On Wed, Jan 19, 2011 at 10:47 AM, J Provine wrote: > >> hi all, >> cambridge nanotech sent a replacement part for the substrate heater >> overnight. it arrived just now. i'm in meetings most of the day, but i'll >> grab time in the snf when i can to start assembling the chamber. this is >> the sequence of events: >> >> 1) install new substrate heater >> 2) assemble chamber >> 3) leak check (first with system pump and then with He leak checker >> 4) bake out (this is several hours) to get the chamber hot and drive off >> moisture that collected. >> 5) test deposition (thursday morning) >> 6) release the tool to others & start training the backlog of new users >> (be willing to let the new users shadow you - they will also be shadowing me >> for the test runs) >> >> of course each step has to be successful for the next step to be enacted. >> i'll keep you updated as this progresses. >> j >> > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Fri Jan 21 09:55:16 2011 From: jprovine at stanford.edu (J Provine) Date: Fri, 21 Jan 2011 09:55:16 -0800 Subject: bake out and hafnia test deposition finished successfully Message-ID: hi all, the bake out and a test hafnia deposition came out beautifully. (100.35A for 100cycles of hafnia.) the issue with the substrate heater connection currently is fixed by work around, but we are taking a crack at fixing that completely today. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Mon Jan 31 16:53:20 2011 From: jprovine at stanford.edu (J Provine) Date: Mon, 31 Jan 2011 16:53:20 -0800 Subject: savannah is green lit Message-ID: hi everyone, the green light is on for savannah. jim and i fixed the heater connector problem today and everything is fully functional. the precursors were rearranged from before so be sure to double check your recipes. all the standard recipes, including the standby recipe, have been updated to reflect the change. for the crew looking to get trained: check coral and any reservation anyone has is game for doing a shadow run (best to ask them in advance). i also several reservations this week to either let people shadow or serve as the final oral test. currently the system has the precursors for ZrO2, HfO2, TiO2, Al2O3, TiN, and HfN on. i can swap in the ZnO for the prinz guys for tests with just a couple of days warning. happy processing. j -------------- next part -------------- An HTML attachment was scrubbed... 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