bake out and hafnia test deposition finished successfully

J Provine jprovine at stanford.edu
Fri Jan 21 09:55:16 PST 2011


hi all,
the bake out and a test hafnia deposition came out beautifully.  (100.35A
for 100cycles of hafnia.)

the issue with the substrate heater connection currently is fixed by work
around, but we are taking a crack at fixing that completely today.
j
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