savannah clear for oxide processing

J Provine jprovine at stanford.edu
Thu Jul 14 15:40:11 PDT 2011


system is on-line for oxide processing.  nitride processing and the ammonia
line are still off-line following the facilities work.
facilities work included
1. the enclosure of the precursor cabinet
2. fitting the precursor cabinet with exhaust
3. switching from the ammonia lecture bottle to the house ammonia line
4. installing an O2 purifier on the ammonia line.

j
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