From jprovine at stanford.edu Wed Mar 2 16:03:10 2011 From: jprovine at stanford.edu (J Provine) Date: Wed, 2 Mar 2011 16:03:10 -0800 Subject: precursor changes Message-ID: hi savannahans, running the monthly quals today i realized the hafnium precursor is nearly exhausted. i installed a new hafnium precursor (same as the old one). monthly qual for ZrO2 and Al2O3 are done. HfO2 (new cannister) and TiO2 quals to be run tonight. also (diethyl)Zn was installed, and tetrakis(ethylmethylamido)Zr was moved to the gas bunker storage. if you want ZrO2 back in the next two weeks, please let me know and we can do a quick change. happy processing. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From hongyuc at stanford.edu Sat Mar 5 14:49:15 2011 From: hongyuc at stanford.edu (Henry Hong-Yu Chen) Date: Sat, 5 Mar 2011 14:49:15 -0800 Subject: release the reservation today Message-ID: We need FGA before ALD, but we just found the FGA didn't work... Sorry for the late notice. From jprovine at stanford.edu Mon Mar 7 20:26:11 2011 From: jprovine at stanford.edu (J Provine) Date: Mon, 7 Mar 2011 20:26:11 -0800 Subject: ALD updates (savannah, fiji-l, and fiji-r) Message-ID: hello ald enthusiasts, back again with a brief update on the status of things. *Savannah* the ammonia bottle is being replaced by the SNF house ammonia line currently. the contractor for the welding came today to meet with Jim Haydon and clarify the project. rough time to completion is 2weeks. in other news, early efforts by neil dasgupta has lead to the beginnings of a working process for ZnO. updates to follow on the website. *Fiji-L and Fiji-R* the latest version of the permit application was submitted last week on wednesday. the fire marshall's office asked for additional drawings today which john will provide tomorrow (tuesday). the clock is ticking for us to hear back about this latest submission. we should hear something in another 2-3 weeks. take care, j -------------- next part -------------- An HTML attachment was scrubbed... URL: From hongyuc at stanford.edu Wed Mar 9 21:43:01 2011 From: hongyuc at stanford.edu (Henry Hong-Yu Chen) Date: Wed, 9 Mar 2011 21:43:01 -0800 Subject: Savannah time release tomorrow 6:30-10:00pm Message-ID: Finished earlier. Thanks From jprovine at stanford.edu Thu Mar 10 11:56:37 2011 From: jprovine at stanford.edu (J Provine) Date: Thu, 10 Mar 2011 11:56:37 -0800 Subject: precursor changes Message-ID: hello all, starting now, zirconia will be back on the savannah until friday noon. friday at noon, zinc-oxide will be back in place. i would like to swap out a cylinder to start some yttria experiments. my first choice would be titania. if the TDMATi precursor was gone from march 20-april 3, would anyone have a problem with that? finally the new ammonia source from the house line is being worked on and jim estimates it will be online with purifier in place around march 23. more concrete timelines as they become available. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Tue Mar 15 16:18:17 2011 From: jprovine at stanford.edu (J Provine) Date: Tue, 15 Mar 2011 16:18:17 -0700 Subject: (TEMA)Zr out, diethylzinc in Message-ID: the zirconium precursor is out and the zinc precursor is in the zirconium precursor is cooling down and once the machine is free tomorrow morning i'll swap the precursors. the standby recipe has already been corrected. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Mar 17 13:20:04 2011 From: jprovine at stanford.edu (J Provine) Date: Thu, 17 Mar 2011 13:20:04 -0700 Subject: precursor change Message-ID: hi savannahans, i will be changing the titanium precursor out on monday morning the 21st to install the yttrium precursor. when i previously announced this only 1 user mentioned a conflict and i have worked out with that user to reinstall the titanium briefly when it is needed for her critical run (with 24 hour notice - and an extra hour in the reservation time to allow for the transfer). in the future standard precursor changes will be made on monday mornings and the list continue to be notified in advance by a week at least. i expect the yttrium precursor to remain on the machine for roughly two weeks to begin recipe development for Y2O3. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberth at quswami.com Tue Mar 22 16:43:41 2011 From: roberth at quswami.com (Robert Huang) Date: Tue, 22 Mar 2011 16:43:41 -0700 Subject: savannah available Wed noon-4PM Message-ID: <3F24868DDBDC7B46B2289E33B58C4CB1221BF324FC@QUSWAMI-DSRV1.quswami.local> Finished with depositions today, so releasing tomorrow's reservation. Robert -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Wed Mar 23 10:55:32 2011 From: jprovine at stanford.edu (J Provine) Date: Wed, 23 Mar 2011 10:55:32 -0700 Subject: change in plan for precursors Message-ID: hello all, apologies for the sudden change in plans. i found out today that the switch to the house ammonia line has been delayed extensively by administrative issues. with that in mind and because of the interest of several users i turned the ammonia back on from the lecture bottle source. i'm doing a test deposition currently, and will do another longer one tonight. with this in mind i have pushed back the beginning of experiments on yttria. (jenny, please get ahold of me to make yttria plans.) the precursors are currently 0 ammonia (lecture bottle) 1 TDMA-Ti 2 TDMA-Hf 3 diethylzinc 4 trimethylaluminum 5 water again i am sorry to reverse course, but i expected the ammonia line to be worked on this week and next. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Wed Mar 23 22:51:34 2011 From: jprovine at stanford.edu (J Provine) Date: Wed, 23 Mar 2011 22:51:34 -0700 Subject: schedule of precursor changes Message-ID: hi savannahites, in trying to get a handle on the needs of precursors on the system, i've scheduled some regular changes over the next month. as usual if you need something urgently, let me know, but this should accommodate most needs as i see them. ammonia, water, TDMA-Hf, and trimethylaluminum will always be on the system. the other two lines will have 3 different precursors rotating through. March 30th: Yttrium and diethylzinc on; TDMA-Ti off April 6th: TDMA-Ti and Yttrium on; diethylzinc off April 13th: Diethylzinc and TDMA-Ti on: Ytrrium off April 20th: Yttrium and diethylzinc on; TDMA-Ti off April 27th: TDMA-Ti and Yttrium on; diethylzinc off May 4th: Diethylzinc and TDMA-Ti on: Ytrrium off we'll plan may more as april closes out. if you know long term plans, please let me know. j -------------- next part -------------- An HTML attachment was scrubbed... URL: