precursor change

J Provine jprovine at stanford.edu
Thu Mar 17 13:20:04 PDT 2011


hi savannahans,
i will be changing the titanium precursor out on monday morning the 21st to
install the yttrium precursor.  when i previously announced this only 1 user
mentioned a conflict and i have worked out with that user to reinstall the
titanium briefly when it is needed for her critical run (with 24 hour notice
- and an extra hour in the reservation time to allow for the transfer).

in the future standard precursor changes will be made on monday mornings and
the list continue to be notified in advance by a week at least.

i expect the yttrium precursor to remain on the machine for roughly two
weeks to begin recipe development for Y2O3.

j
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