change in plan for precursors
J Provine
jprovine at stanford.edu
Wed Mar 23 10:55:32 PDT 2011
hello all,
apologies for the sudden change in plans. i found out today that the switch
to the house ammonia line has been delayed extensively by administrative
issues. with that in mind and because of the interest of several users i
turned the ammonia back on from the lecture bottle source. i'm doing a test
deposition currently, and will do another longer one tonight. with this in
mind i have pushed back the beginning of experiments on yttria. (jenny,
please get ahold of me to make yttria plans.)
the precursors are currently
0 ammonia (lecture bottle)
1 TDMA-Ti
2 TDMA-Hf
3 diethylzinc
4 trimethylaluminum
5 water
again i am sorry to reverse course, but i expected the ammonia line to be
worked on this week and next.
j
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