From jennyhu at stanford.edu Wed May 11 13:48:02 2011 From: jennyhu at stanford.edu (Jenny Hu) Date: Wed, 11 May 2011 13:48:02 -0700 (PDT) Subject: Savannah Free Today 2:30 PM to 7 PM Message-ID: <187136350.137658.1305146882024.JavaMail.root@zm06.stanford.edu> Sorry for last minute changes. From jprovine at stanford.edu Wed May 11 16:21:21 2011 From: jprovine at stanford.edu (J Provine) Date: Wed, 11 May 2011 16:21:21 -0700 Subject: ALD updates (savannah, fiji-l, and fiji-r) Message-ID: hi everyone, every indication is that the county fire marshall has finally granted a permit for operation of the fiji system. i've gone on the record in the past as saying that once the permit is granted it will be roughly a month to get the system ready for users. the next steps are inspection by the fire marshall's office and an acceptance test performed by cambridge nanotech. so i'll keep you updated as things progress, but tentatively the fiji could be ready for use june 11, 2011 fire marshall's inspection: we have a couple of interlocks to put in place before this, but we are trying to schedule the inspection soon. after the inspection is passed we can proceed with the acceptance test. cambridge nanotech will be on site to demonstrate alumina and hafnia films in both chambers with water, o2 plasma, and ozone (only on fiji-l). if all these films are acceptably deposited then the tool is ours and we will begin developing additional recipes and training users. training will be similar to the savannah. more details as they become available. reminder that if you have ald questions, the best time to ask is during my office hours (wed 4-6pm or friday 9-11am in allen 127x). take care, j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Sat May 21 00:07:38 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Sat, 21 May 2011 00:07:38 -0700 Subject: savannah released Sat 1 - 9pm Message-ID: Samples not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Wed May 25 13:23:23 2011 From: jprovine at stanford.edu (J Provine) Date: Wed, 25 May 2011 13:23:23 -0700 Subject: Do not change the overpressure setpoint Message-ID: Unless you have talked to me about this before, you should never change the overpressure setting from the standard value at 250Torr. As of now no one has permission to change this parameter, and to do so you must speak with me to regain this ability. If you find the overpressure value at other than 250Torr report this on coral. J