From jprovine at stanford.edu Sun Oct 2 18:25:41 2011 From: jprovine at stanford.edu (J Provine) Date: Sun, 2 Oct 2011 18:25:41 -0700 Subject: a note on heater 10 for savannah Message-ID: hi all, if you saw jason lin's comment on savannah you'll note that the heater 10 is consistently reporting below its setpoint of 150C. this has been consistent since cabinet was encased and exhausted this summer. the heater tends to stabilize around 142-145C and despite running at nearly 100% duty cycle does not reach 150C. this has not caused any change in qualification tests. please let me know if you are seeing any issue with your depositions, but since the situation is stable and the manifold is still hotter than the precursors and cooler than the reaction chamber, i will leave the situation alone. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Sun Oct 2 18:32:38 2011 From: jprovine at stanford.edu (J Provine) Date: Sun, 2 Oct 2011 18:32:38 -0700 Subject: shut down information Message-ID: hello savannah users, as you saw from Dr. Bumgarner's email last week about the holiday shutdown, the lab will be closed and offline starting at 5pm on 12.14.2011. because the savannah chamber and pump are both cleaned over the holiday closure, and no one will be able to enter during the shutdown, the system will go offline 24 hours before the fab closes (namely 5pm 12.13.2011). the shutdown procedure is that on the evening of the 13th, the precursors will be manually closed off, checked for leaks, and removed. also the heaters will be shutdown and the pump turned off. the following morning, the chamber will be disassembled and sent out for cleaning. Similarly the pump will be removed for service as well. Then on the 14th, the system will be wrapped to protect against dirt and other contaminants during the infrastructure work over the holidays. if you have any questions or concerns, please let me know. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Sun Oct 2 23:13:19 2011 From: jprovine at stanford.edu (J Provine) Date: Sun, 2 Oct 2011 23:13:19 -0700 Subject: fiji status update In-Reply-To: References: Message-ID: Greetings ALD enthusiasts, nothing ever seems to go aas smoothly or as quickly as anticipated, but we have both fiji-l and fiji-r running with good success so far. the websites for both of these tools are up and from now on these are the first place to check for information about what is going on with these tools. you can find the information here: https://snf.stanford.edu/SNF/equipment/chemical-vapor-deposition/ald additionally, the savannah website is more thoroughly updated with a healthy amount of characterization data for that tool available. training information is available on each tool's page. preliminary characterization data is available at each tool's page. as more data continues to come in, these pages will be regularly updated. a number of brave souls have gotten trained on the fijis and through the process of working with them, i believe we have most of the kinks and stumbling points for training and understanding worked out. i have piles of wafers from various test depositions, which are available to interested parties who wish to test something related to the deposited films. simply ask and you may have the wafers if you promise to provide the testing data for your fellow labmates benefit. thanks for you patience. now let's push these tools hard for new capabilities and research. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Tue Oct 11 02:03:22 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Tue, 11 Oct 2011 02:03:22 -0700 Subject: savannah released today 3pm - 11pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From attila at quswami.com Mon Oct 17 15:24:38 2011 From: attila at quswami.com (Attila Horvath) Date: Mon, 17 Oct 2011 15:24:38 -0700 Subject: HfO2 MOSCAP's? Message-ID: <3F24868DDBDC7B46B2289E33B58C4CB12E98C01D77@QUSWAMI-DSRV1.quswami.local> Dear Users, Has any of you recently fabricated MOSCAP's on p-type wafers using HfO2 as dielectric? Please send me an email if so.. I have a general question regarding your CV curve. Thanks, Attila -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Sun Oct 23 18:24:25 2011 From: jprovine at stanford.edu (J Provine) Date: Sun, 23 Oct 2011 18:24:25 -0700 Subject: precursors galore thanks to chris kenney and slac Message-ID: Hello ald users, if you have or plan to use any of the ald units in the snf in the fall quarter (or beyond) you will be the beneficiary of the extreme generosity of Chris Kenney and his group at SLAC. they paid for several new precursor sources to keep our stock in good stead for many different thin films. if you see chris, please offer him the thanks he richly deserves for this act. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From wslee at stanford.edu Fri Oct 28 10:54:43 2011 From: wslee at stanford.edu (Scott Lee) Date: Fri, 28 Oct 2011 10:54:43 -0700 Subject: Reservation released today 11am-3pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: