From mmleczko at stanford.edu Mon Aug 6 10:32:00 2012 From: mmleczko at stanford.edu (Michal Jakub Mleczko) Date: Mon, 6 Aug 2012 10:32:00 -0700 (PDT) Subject: New User Shadowing In-Reply-To: <599987252.43562991.1344274057844.JavaMail.root@zm05.stanford.edu> Message-ID: <495920481.43577995.1344274320451.JavaMail.root@zm05.stanford.edu> Hello fellow lab-members, I'm a EE graduate student who will need to use the Savannah ALD for some upcoming device work (mostly Al2O3 and HfO dielectrics on graphene ribbons). Per the suggested training system, I'm wondering if anyone using the tool in the next several weeks would be open to having me shadow and can introduce the system. I have some background on ALD through the EE 212 class and undergraduate courses on surface science. Thanks for your time, Michal Mleczko PhD Student in EE From shott at stanford.edu Mon Aug 6 22:10:49 2012 From: shott at stanford.edu (John Shott) Date: Mon, 06 Aug 2012 22:10:49 -0700 Subject: Slippery floor near the Savannah ... Message-ID: <5020A359.8050502@stanford.edu> Savannah Users: Earlier this evening, Woo Shik reported that the floor is slippery in front of the Savannah. I believe that it is due to leakage from the little pump in the base of the cabinet, but that is not yet fully confirmed. Woo Shik did a nice job of putting barrier tape in front of the machine and I added a few warning signs. I also put down some absorbent pads immediately in front of the machine and then tried to remove some of the slipperiness in the surrounding area by wiping with methanol soaked wipes. I think that it is better now, but still deserves more serious investigation in the morning. I see no reason to shutdown the machine as it appears to be pumping normally, oil is still above the minimum level, and I see no indications of a massive leak. However, the floor of the cabinet does have some oil on it. I suggest that once this is cleaned up, we acquire a baking pan of the appropriate size with ~3/4" high sidewalls to put underneath the pump on the floor of the cabinet. Oil pumps should always have some form of leak containment under them because they WILL develop leaks. As a secondary issue, I did not see a clear label on or near the pump indicating whether it is filled with fomblin (and, if so, what weight) or whether it is filled with white oil. While I suspect that it is fomblin and it feels more like fomblin to me, it should be clearly labeled so that we know for certain. Particularly for those folks who may be using the savannah later this evening, please be very careful near the machine because of possible slipperiness on the floor. Please walk very carefully in this area as if you were walking on ice: take short steps and place your feet carefully. While I believe that the floor is now significantly less slippery than it was earlier, it is best to be cautious. Please note any further problems but please be more careful than usual when loading/unloading wafers, typing at the keyboard, etc. Thanks, John From mmrincon at stanford.edu Tue Aug 21 13:00:08 2012 From: mmrincon at stanford.edu (Michelle Rincon) Date: Tue, 21 Aug 2012 13:00:08 -0700 Subject: Storage under Fiji table Message-ID: Hello users, The shelf of the table under the manipulators for the Fiji tools has gotten quite messy. I am planning to put some storage bins under there at the beginning of next week, but want to give you fair warning to clear your stuff out of there first! Please clear your wafers and tools off of the shelf by Monday, August 27th. Once the bins are in, if you would like to request a drawer for storage, the procedure will be to make the request through Maureen (the same as all of the other user storage drawers). Thanks! Michelle --------------------------------------------- Michelle Rincon, PhD Process Staff Engineer Stanford Nanofabrication Facility (650)-725-0307 mmrincon at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: