Precursor requests

Michelle Rincon mmrincon at
Thu Dec 6 15:46:47 PST 2012

Hello Savannah users,

As you may have noticed the Savannah tool time is getting quite booked.  I would like to remind everyone that it is necessary to make a comment in the maintenance section stating which precursor you plan to use for your reservation.  Please do this at least 24 hours in advance of your reservation- and if your reservation is over the weekend, please request your precursor by the end of the day on Thursdays.  The only standard precursor that is installed is DI water.  There is no guarantee that any other precursor will be on there so if you have not made a request at least 24 hours in advance, please be aware that you may not be able to deposit the film you need.

Thank you,

Michelle Rincon, PhD
Process Staff Engineer
Stanford Nanofabrication Facility

mmrincon at

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