ald return to service update

J Provine jprovine at
Tue Feb 14 06:57:27 PST 2012

hello ald-ers,
with the announcement of the opening of the SNF, i want to update you on
the ald systems return to service.  i am away at a funding review today
(tuesday) through thursday and will be in berkeley on friday.  i'll come in
over the weekend to start work on the systems.  as indicated below, return
to service is dependent on troubleshooting and testing the repairs from
over the break, and i'll update further by mid next week about how these
tests are progressing.

On Mon, Feb 6, 2012 at 3:09 AM, J Provine <jprovine at> wrote:

> hi everyone,
> as you saw from the last labmember email, the snf is nearly back to being
> opened for users after the extensive rennovation project of the last
> ~2months.  no definite time table is in place, but i wanted to let you know
> the plan and process for getting the ald systems back online.  currently i
> am out of the country, but i'll be back at stanford on thursday the 9th.
> *once i am back AND the lab is open for users i will start bringing the
> savannah, fiji1, and fiji2 back online.*
> this involves restarting the pumps and heaters for each tool, installing
> the pieces that were cleaned or repaired over break, testing components,
> only when all of these matters are fixed, will i be able to start test
> depositions to check for system operation.
> *how fast will the tools return?*
> this has several variables as each tool has several systems to reinstall
> and check and until those checks are performed i won't know exactly what
> delays we can expect.
> *
> *
> *fiji1*
> it is most likely that the fiji1 will return first because it had no parts
> out for repair/replacement other than the substrate plate which is being
> cleaned.  in the event everything works just as before the shutdown, we
> could expect to have the fiji1 back online 48-72 hours after i get started
> working on it.
> *fiji2*
> fiji2 had its substrate holder cleaned and parts replaced on the manifold.
>  even if everything works as before i will need to leak check the new ald
> line and reassemble/reinstall the manifold.  i would not hazard a guess as
> to how long returning the system could be but i will keep the list updated
> as i go through each check.
> *savannah*
> like the fiji2, the savannah had its manifold pulled and some minor repair
> work done over shutdown.  also the pump was serviced and the reaction
> chamber cleaned.  since i have previous experience restarting this tool
> after prior shutdowns, i would expect to have it ready for troubleshooting
> the manifold repair efforts by 48 hours after getting access to the tool
> and all its components.  how long the troubleshooting will take is unknown
> and i'll update as the progress goes.
> *new tools in the snf.*
> before shutdown we physically moved in the *fiji3* plasma/thermal ald
> system, this system will be oxide chemistries only and cleanliness
> classification like fiji2 (open to a very wide range of materials).  over
> shutdown we took delivery of a savannah system for mvd (to be named *
> savannah-mvd*) which will be interfaced with a non-reactive environment
> glovebox.  currently we are preparing scope of work packages in order to
> accept bids for permitting and facilitizing both of these systems.  once we
> have selected a contractor and we will know the expected timeline for
> facilitization, permit, and install test from the contractors and cambridge
> nanotech.  that information will be passed on to users as it becomes more
> concrete.
> *precursors*
> we have all of our standard precursors stocked and will be ordering
> backups and some new experimental precursors soon.
> any questions, please let me know.  more information will be coming as we
> get the snf and ald capabilities back online.
> j
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