Software update

Michelle Rincon mmrincon at
Thu Sep 13 15:02:55 PDT 2012

Hello Savannah users,

The software on the Savannah has been updated.  Loading a wafer and loading the recipe is similar to the previous software version.  The major change is that the notepad document is no longer needed since the software now provides the ability to label the precursor bottles on the screen (similar to the Fiji labeling).    The other change is that when you finish processing, please click on the log off icon, then choose SWITCH USER, not LOGOFF.  This will keep the Savannah control software running and the tool hot.  The password is the same as it was before.

Please let me know if you have any questions!!!


Michelle Rincon, PhD
Process Staff Engineer
Stanford Nanofabrication Facility

mmrincon at

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