From mmrincon at stanford.edu  Tue Jan 29 15:34:27 2013
From: mmrincon at stanford.edu (Michelle Rincon)
Date: Tue, 29 Jan 2013 15:34:27 -0800
Subject: [savannah] Savannah is up!
Message-ID: <D9564A0B-0C9D-49F0-9B1C-029AF44E5094@stanford.edu>

Hello Savannah users,

I know many of you have been anxiously awaiting Savannah availability.  The tool is ready to be used!  We finally managed to close out the last issue and the monitor wafer run looks good.  

I have TDMA-Ti, TDMA-Hf, and TMA on the system.  Please make a comment in Badger when you make your reservation if you will need any additional precursors.

Best,
Michelle


---------------------------------------------
Michelle Rincon, PhD
Process Staff Engineer
Stanford Nanofabrication Facility

(650)-725-0307
mmrincon at stanford.edu









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From pradeep.nataraj at gmail.com  Tue Jan 29 15:55:56 2013
From: pradeep.nataraj at gmail.com (Pradeep Nataraj)
Date: Tue, 29 Jan 2013 15:55:56 -0800
Subject: [savannah] Savannah is up!
In-Reply-To: <D9564A0B-0C9D-49F0-9B1C-029AF44E5094@stanford.edu>
References: <D9564A0B-0C9D-49F0-9B1C-029AF44E5094@stanford.edu>
Message-ID: <CAEhDSubkefJEJ2nRX=gyWYSHp=NUCz+WCeZLYkVY7_PejFNe7g@mail.gmail.com>

Michelle,
Many thanks to you and Jim Haydon for getting it up and running.
Thank you.
Pradeep


On Tue, Jan 29, 2013 at 3:34 PM, Michelle Rincon <mmrincon at stanford.edu>wrote:

> Hello Savannah users,
>
> I know many of you have been anxiously awaiting Savannah availability.
>  The tool is ready to be used!  We finally managed to close out the last
> issue and the monitor wafer run looks good.
>
> I have TDMA-Ti, TDMA-Hf, and TMA on the system.  Please make a comment in
> Badger when you make your reservation if you will need any additional
> precursors.
>
> Best,
> Michelle
>
>
> ---------------------------------------------
> Michelle Rincon, PhD
> Process Staff Engineer
> Stanford Nanofabrication Facility
>
> (650)-725-0307
> mmrincon at stanford.edu
>
>
>
>
>
>
>
>
>
>
> _______________________________________________
> savannah mailing list
> savannah at snf.stanford.edu
> http://snf.stanford.edu/mailman/listinfo/savannah
>
>
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From jprovine at stanford.edu  Wed Jan 30 10:36:43 2013
From: jprovine at stanford.edu (J Provine)
Date: Wed, 30 Jan 2013 10:36:43 -0800
Subject: [savannah] ALD capabilities outside the cleanroom
Message-ID: <CAOKRUakiPUzJGCQqhbmi852DkbG3SLz97zfHyydxcXR-nKNsww@mail.gmail.com>

hi SNF ald enthusiasts,
there is a chance to expand the shared facilities ald capabilites at
stanford further than they currently are arranged.  in particular there is
some groundswell interest in establishing a shared access ALD system
outside the cleanroom (but still under the SNF umbrella) for coating of
powders, particles, etc that are not allowed in the cleanroom.

would you please contact me if this is intriguing to you or your research
group/company?  please distribute this inquiry further to your friends,
PIs, labmates, etc who might also have input.

even if particle coating is not of interest to you specifically, please
feel free to write back about other advancements or improvements in
capability, capacity, etc that would be desirable within shared fabrication
facilities.

timeline is that in a week plus there is a meeting with some folks who
could help make the possibility of our desires a reality, so make sure your
input is included for maximum impact.

thank you.
j
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