[savannah] Savannah is up!

Michelle Rincon mmrincon at stanford.edu
Tue Jan 29 15:34:27 PST 2013

Hello Savannah users,

I know many of you have been anxiously awaiting Savannah availability.  The tool is ready to be used!  We finally managed to close out the last issue and the monitor wafer run looks good.  

I have TDMA-Ti, TDMA-Hf, and TMA on the system.  Please make a comment in Badger when you make your reservation if you will need any additional precursors.


Michelle Rincon, PhD
Process Staff Engineer
Stanford Nanofabrication Facility

mmrincon at stanford.edu

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