[savannah] Savannah is up!

Pradeep Nataraj pradeep.nataraj at gmail.com
Tue Jan 29 15:55:56 PST 2013


Michelle,
Many thanks to you and Jim Haydon for getting it up and running.
Thank you.
Pradeep


On Tue, Jan 29, 2013 at 3:34 PM, Michelle Rincon <mmrincon at stanford.edu>wrote:

> Hello Savannah users,
>
> I know many of you have been anxiously awaiting Savannah availability.
>  The tool is ready to be used!  We finally managed to close out the last
> issue and the monitor wafer run looks good.
>
> I have TDMA-Ti, TDMA-Hf, and TMA on the system.  Please make a comment in
> Badger when you make your reservation if you will need any additional
> precursors.
>
> Best,
> Michelle
>
>
> ---------------------------------------------
> Michelle Rincon, PhD
> Process Staff Engineer
> Stanford Nanofabrication Facility
>
> (650)-725-0307
> mmrincon at stanford.edu
>
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>
> _______________________________________________
> savannah mailing list
> savannah at snf.stanford.edu
> http://snf.stanford.edu/mailman/listinfo/savannah
>
>
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