From yuhykr at snf.stanford.edu  Wed Dec  5 18:11:17 2007
From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu)
Date: Wed, 5 Dec 2007 18:11:17 -0800
Subject: Problem sem4160 SNF 2007-12-05 18:11:16: sec door doesn't work
Message-ID: <mailman.161.1356283028.4532.sem4160-pcs@snf.stanford.edu>

We left sample inside...Sec switch doesn't work...



From raneeyoo at snf.stanford.edu  Wed Dec  5 19:30:42 2007
From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu)
Date: Wed, 5 Dec 2007 19:30:42 -0800
Subject: Comment sem4160 SNF 2007-12-05 19:30:41: I unloaded the sample
Message-ID: <mailman.162.1356283028.4532.sem4160-pcs@snf.stanford.edu>

SEC door works.  I unloaded the sample.



From rissman at snf.stanford.edu  Thu Dec  6 09:06:58 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Thu, 6 Dec 2007 09:06:58 -0800
Subject: Problem sem4160 SNF 2007-12-05 18:11:16: sec door doesn't work
Message-ID: <mailman.163.1356283028.4532.sem4160-pcs@snf.stanford.edu>

next user was able to get door to work and removed sample.



From rissman at snf.stanford.edu  Thu Dec  6 09:07:13 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Thu, 6 Dec 2007 09:07:13 -0800
Subject: Comment sem4160 SNF 2007-12-05 19:30:41: I unloaded the sample
Message-ID: <mailman.164.1356283028.4532.sem4160-pcs@snf.stanford.edu>

Thank you.



From emyers at snf.stanford.edu  Sat Dec  8 05:04:53 2007
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Sat, 8 Dec 2007 05:04:53 -0800
Subject: Shutdown sem4160 SNF 2007-12-08 05:04:53: power outage
Message-ID: <mailman.165.1356283028.4532.sem4160-pcs@snf.stanford.edu>

tool needs to be restarted



From tberg at snf.stanford.edu  Sun Dec  9 10:56:06 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Sun, 9 Dec 2007 10:56:06 -0800
Subject: Comment sem4160 SNF 2007-12-09 10:56:05: SEM is back in high vac
Message-ID: <mailman.166.1356283028.4532.sem4160-pcs@snf.stanford.edu>

Coral issues



From tberg at snf.stanford.edu  Sun Dec  9 11:04:32 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Sun, 9 Dec 2007 11:04:32 -0800
Subject: Shutdown sem4160 SNF 2007-12-08 05:04:53: power outage
Message-ID: <mailman.167.1356283028.4532.sem4160-pcs@snf.stanford.edu>

Started system back up. back in high vac. removed wafer fromchamber



From tberg at snf.stanford.edu  Sun Dec  9 11:05:14 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Sun, 9 Dec 2007 11:05:14 -0800
Subject: Comment sem4160 SNF 2007-12-09 10:56:05: SEM is back in high vac
Message-ID: <mailman.168.1356283028.4532.sem4160-pcs@snf.stanford.edu>

no other problems noted