From jwc at snf.stanford.edu Fri Oct 5 11:04:21 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 5 Oct 2007 11:04:21 -0700 Subject: Shutdown sem4160 SNF 2007-10-05 11:04:20: XY stage crash -- pallet slid off holder mount Message-ID: paul J: ASML user had a bad load. It now appears that the pallet has slid off the XY stage mount. they brought this to my attention and I found the pallet hung up on the lens in a verticle position. manually moved stage a few mm forward to allow pallet to fall back down onto the XY stage mount. likely will have to vent to recover system... JWC for the ASML Group From tberg at snf.stanford.edu Fri Oct 5 13:42:13 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Oct 2007 13:42:13 -0700 Subject: Shutdown sem4160 SNF 2007-10-05 11:04:20: XY stage crash -- pallet slid off holder mount Message-ID: Vented Chamber retreived pallet and put back in hIGH vAC From shanewang at snf.stanford.edu Mon Oct 8 17:27:53 2007 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Mon, 8 Oct 2007 17:27:53 -0700 Subject: Comment sem4160 SNF 2007-10-08 17:27:53: SEM cannot be enabled and disabled Message-ID: I used about 1 hour in the afternoon. I enabled, but my name is not shown at the tool. The tool was physcally enabled with "ON" sign. After I finished using, it cannot be disabled. From shanewang at snf.stanford.edu Mon Oct 8 17:29:26 2007 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Mon, 8 Oct 2007 17:29:26 -0700 Subject: Problem sem4160 SNF 2007-10-08 17:29:25: SEM enable and disable Message-ID: It is still enabled, and cannot be disabled. It may not affect the operation. From mtang at snf.stanford.edu Tue Oct 9 08:49:11 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 9 Oct 2007 08:49:11 -0700 Subject: Problem sem4160 SNF 2007-10-08 17:29:25: SEM enable and disable Message-ID: A Coral issue. Disabled and adjusted Shane's time. From mtang at snf.stanford.edu Tue Oct 9 08:49:27 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 9 Oct 2007 08:49:27 -0700 Subject: Comment sem4160 SNF 2007-10-08 17:27:53: SEM cannot be enabled and disabled Message-ID: Disabled and adjusted. From jesselu at snf.stanford.edu Wed Oct 10 14:47:33 2007 From: jesselu at snf.stanford.edu (jesselu at snf.stanford.edu) Date: Wed, 10 Oct 2007 14:47:33 -0700 Subject: Comment sem4160 SNF 2007-10-10 14:47:33: stage drift Message-ID: I noticed that when tilted at 30 degrees the stage seemed to be slowly drifting in the downward direction. The result is that in slow scan mode the picture gets stretched in that direction. From barlian at snf.stanford.edu Wed Oct 17 23:37:10 2007 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Wed, 17 Oct 2007 23:37:10 -0700 Subject: Comment sem4160 SNF 2007-10-17 23:37:10: sec air lock valve was already opened before i even used it Message-ID: From jerabek at snf.stanford.edu Thu Oct 18 09:09:32 2007 From: jerabek at snf.stanford.edu (jerabek at snf.stanford.edu) Date: Thu, 18 Oct 2007 09:09:32 -0700 Subject: Shutdown sem4160 SNF 2007-10-18 09:09:32: shutdown Message-ID: after opening SEC airlock valve HV controls are not enabled and beam can't be turned on. Everything else looks normal. -Paul From jwc at snf.stanford.edu Thu Oct 18 10:28:16 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 18 Oct 2007 10:28:16 -0700 Subject: Shutdown sem4160 SNF 2007-10-18 09:09:32: shutdown Message-ID: latching relay to the SC air lock valve was 'stuck' reset the display console -- switched the sc isolation valve to column several times till it unlatched the switch to the HV. Alignedd column and apertures for 5 kv 5 mm WD system is now back up and ready for users in the queue. james conway From afong at snf.stanford.edu Fri Oct 19 09:46:58 2007 From: afong at snf.stanford.edu (afong at snf.stanford.edu) Date: Fri, 19 Oct 2007 09:46:58 -0700 Subject: Problem sem4160 SNF 2007-10-19 09:46:57: no image Message-ID: similar to problem yesterday, first no images. PJ reset the display power, no HV. After few open and close the S.C air lock valve, image reappeared for 5 minutes then disappear again. From jerabek at snf.stanford.edu Fri Oct 19 09:48:26 2007 From: jerabek at snf.stanford.edu (jerabek at snf.stanford.edu) Date: Fri, 19 Oct 2007 09:48:26 -0700 Subject: Shutdown sem4160 SNF 2007-10-19 09:48:25: shutdown Message-ID: lost image during observation , intermittently doesn't enable HV when opening SC air lock valve, connection to the detector unstable. -Paul From jwc at snf.stanford.edu Fri Oct 19 11:43:45 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 19 Oct 2007 11:43:45 -0700 Subject: Comment sem4160 SNF 2007-10-17 23:37:10: sec air lock valve was already opened before i even used it Message-ID: From tberg at snf.stanford.edu Tue Oct 23 10:37:57 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 23 Oct 2007 10:37:57 -0700 Subject: Shutdown sem4160 SNF 2007-10-19 09:48:25: shutdown Message-ID: Intermittant problem to Yellow for testing From rostam at snf.stanford.edu Tue Oct 23 13:13:52 2007 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 23 Oct 2007 13:13:52 -0700 Subject: Shutdown sem4160 SNF 2007-10-23 13:13:51: not working Message-ID: lowered V_acc and everything stopped working. The screen was bright white. lowering brightness didn't help. From tberg at snf.stanford.edu Tue Oct 23 13:37:43 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 23 Oct 2007 13:37:43 -0700 Subject: Shutdown sem4160 SNF 2007-10-23 13:13:51: not working Message-ID: dropped brightness a lot and it seems fine From afong at snf.stanford.edu Wed Oct 24 10:26:49 2007 From: afong at snf.stanford.edu (afong at snf.stanford.edu) Date: Wed, 24 Oct 2007 10:26:49 -0700 Subject: Comment sem4160 SNF 2007-10-24 10:26:47: general observation Message-ID: managed to get in working in 4KV Vacc, however image is drifting whether tilt is zero or 30 degree From jwc at snf.stanford.edu Fri Oct 26 09:05:02 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 26 Oct 2007 09:05:02 -0700 Subject: Problem sem4160 SNF 2007-10-19 09:46:57: no image Message-ID: From jwc at snf.stanford.edu Fri Oct 26 16:11:19 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 26 Oct 2007 16:11:19 -0700 Subject: Comment sem4160 SNF 2007-10-24 10:26:47: general observation Message-ID: checked using a conductive sample. Noted that there are some stiction in the stage and it will creep slightly but once it was settled there was no image drift. possibly reporting person was imaging resist or non-conductive samples. jwc From jwc at snf.stanford.edu Fri Oct 26 16:11:24 2007 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 26 Oct 2007 16:11:24 -0700 Subject: Comment sem4160 SNF 2007-10-10 14:47:33: stage drift Message-ID: From rik at snf.stanford.edu Fri Oct 26 17:45:26 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 26 Oct 2007 17:45:26 -0700 Subject: Problem sem4160 SNF 2007-10-26 17:45:26: No SEM image being dispayed on the screen Message-ID: From jparker at snf.stanford.edu Sat Oct 27 11:21:03 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Sat, 27 Oct 2007 11:21:03 -0700 Subject: Comment sem4160 SNF 2007-10-27 11:21:01: More on rik' s 10/26 problem Message-ID: Rik's problem reproducible. Not a contrast/brightness issue, no image shows up. After S.C. Air Lock Valve is open with a beam on for 20 seconds with no image, S.C. Air Lock Valve toggles open and closed of its own accord (this shuts down the beam automatically), or at least sounds like it does (only done once, then gave up on machine). Misc: Machine set to run at 12uA instead of 10uA as instructions say, but wasn't sure if this was intentional or not. From barlian at snf.stanford.edu Sun Oct 28 19:41:57 2007 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sun, 28 Oct 2007 19:41:57 -0700 Subject: Problem sem4160 SNF 2007-10-28 19:41:56: no image Message-ID: same as previous messages From auprabhu at snf.stanford.edu Mon Oct 29 11:34:56 2007 From: auprabhu at snf.stanford.edu (auprabhu at snf.stanford.edu) Date: Mon, 29 Oct 2007 11:34:56 -0700 Subject: Shutdown sem4160 SNF 2007-10-29 11:34:55: no image Message-ID: previous three users in last 2 days found the same problem. From tberg at snf.stanford.edu Tue Oct 30 13:32:30 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 Oct 2007 13:32:30 -0700 Subject: Comment sem4160 SNF 2007-10-30 13:32:29: 4160 PM Message-ID: Hitachi will be here either tomorrow or Friday to look at issues and perform PM From tberg at snf.stanford.edu Wed Oct 31 12:30:24 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 31 Oct 2007 12:30:24 -0700 Subject: Comment sem4160 SNF 2007-10-30 13:32:29: 4160 PM Message-ID: From tberg at snf.stanford.edu Wed Oct 31 12:31:04 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 31 Oct 2007 12:31:04 -0700 Subject: Problem sem4160 SNF 2007-10-28 19:41:56: no image Message-ID: noted From tberg at snf.stanford.edu Wed Oct 31 12:31:17 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 31 Oct 2007 12:31:17 -0700 Subject: Shutdown sem4160 SNF 2007-10-29 11:34:55: no image Message-ID: PM Begun From tberg at snf.stanford.edu Wed Oct 31 12:32:16 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 31 Oct 2007 12:32:16 -0700 Subject: Shutdown sem4160 SNF 2007-10-31 12:32:14: Annual PM Message-ID: System is baking