Shutdown sem4160 SNF 2007-10-05 11:04:20: XY stage crash -- pallet slid off holder mount

jwc at snf.stanford.edu jwc at snf.stanford.edu
Fri Oct 5 11:04:21 PDT 2007


paul J:
ASML user had a bad load.  It now appears that the pallet has slid off the XY stage mount.  they brought this to my attention and I found the pallet hung up on the lens in a verticle position.
manually moved stage a few mm forward to allow pallet to fall back down onto the XY stage mount.  likely will have to vent to recover system...
JWC for the ASML Group




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