Shutdown sem4160 SNF 2007-10-05 11:04:20: XY stage crash -- pallet slid off holder mount

[jwc at snf.stanford.edu]

paul J:
ASML user had a bad load.  It now appears that the pallet has slid off the XY stage mount.  they brought this to my attention and I found the pallet hung up on the lens in a verticle position.
manually moved stage a few mm forward to allow pallet to fall back down onto the XY stage mount.  likely will have to vent to recover system...
JWC for the ASML Group