From wwang at snf.stanford.edu Sun Mar 2 00:25:35 2008 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Sun, 2 Mar 2008 00:25:35 -0800 Subject: Problem sem4160 SNF 2008-03-02 00:25:35: Error message: air lock valve open Message-ID: when I opened the SEC valve during unloading, an error message appeared on the control panel " air lock valve open", even though I have switched off the air lock valve. As a result, the SEC valve is interlocked and I couldn't take out my sample. From tberg at snf.stanford.edu Mon Mar 3 08:38:19 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Mar 2008 08:38:19 -0800 Subject: Problem sem4160 SNF 2008-03-02 00:25:35: Error message: air lock valve open Message-ID: vented exchange chamber no sample, system working normally From nharjee at snf.stanford.edu Mon Mar 3 15:08:12 2008 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Mon, 3 Mar 2008 15:08:12 -0800 Subject: Problem sem4160 SNF 2008-03-03 15:08:11: S.C. Air Lock Valve Switch Message-ID: When I came to the machine, the S.C. Air Lock Valve switch was completely out of its socket and unusable. From ahryciw at snf.stanford.edu Mon Mar 3 15:46:01 2008 From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu) Date: Mon, 3 Mar 2008 15:46:01 -0800 Subject: Comment sem4160 SNF 2008-03-03 15:46:00: S.C. air lock valve switch Message-ID: The S.C. Air Lock Valve switch appeared as normal for the duration of my session. From tberg at snf.stanford.edu Tue Mar 4 07:29:18 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 4 Mar 2008 07:29:18 -0800 Subject: Problem sem4160 SNF 2008-03-03 15:08:11: S.C. Air Lock Valve Switch Message-ID: Repaired broken switch. Please use caution when switching. Pull out first then move From tberg at snf.stanford.edu Tue Mar 4 07:29:30 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 4 Mar 2008 07:29:30 -0800 Subject: Comment sem4160 SNF 2008-03-03 15:46:00: S.C. air lock valve switch Message-ID: Repaired broken switch. Please use caution when switching. Pull out first then move From raneeyoo at snf.stanford.edu Tue Mar 11 23:50:20 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Tue, 11 Mar 2008 23:50:20 -0700 Subject: Problem sem4160 SNF 2008-03-11 23:50:18: cannot take the sample holder out Message-ID: I cannot take the sample holder out from the chamber. The stage is in the exchange position. I closed the air lock valve, opened SEC valve, and inserted the rod into the holder. However, when I tried to slide the rod into the sample holder and screw it, but it did not work. Currently, my two samples are on the specimen holder inside the chamber. The sample holder is in the exchange position. Airlock valve and SEC valve are closed. SC and SEC are under vacuum. From raneeyoo at snf.stanford.edu Tue Mar 11 23:56:39 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Tue, 11 Mar 2008 23:56:39 -0700 Subject: Problem sem4160 SNF 2008-03-11 23:56:38: samples are inside of the chamber Message-ID: My two samples are inside the chamber. I made two notes on the machine. Please unload my samples. I put two boxes on the table with notes. I sent email to Ted and James. thank you very much. From tberg at snf.stanford.edu Wed Mar 12 07:38:52 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Mar 2008 07:38:52 -0700 Subject: Problem sem4160 SNF 2008-03-11 23:50:18: cannot take the sample holder out Message-ID: re-homed rotation removed samples From tberg at snf.stanford.edu Wed Mar 12 07:39:01 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Mar 2008 07:39:01 -0700 Subject: Problem sem4160 SNF 2008-03-11 23:56:38: samples are inside of the chamber Message-ID: re-homed rotation removed samples From dkozak at snf.stanford.edu Thu Mar 20 13:08:42 2008 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Thu, 20 Mar 2008 13:08:42 -0700 Subject: Problem sem4160 SNF 2008-03-20 13:08:42: Handle broken Message-ID: Sample transfer rod, handle is loose, does not rotate the shaft. Have to hold shaft with paper and rotate. From jwc at snf.stanford.edu Thu Mar 20 13:13:24 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 20 Mar 2008 13:13:24 -0700 Subject: Problem sem4160 SNF 2008-03-20 13:08:42: Handle broken Message-ID: tightened up the set screws (2) to the shaft and all is A-OK now... JWC From raneeyoo at snf.stanford.edu Sat Mar 22 14:32:00 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sat, 22 Mar 2008 14:32:00 -0700 Subject: Shutdown sem4160 SNF 2008-03-22 14:31:59: cannot unload sample Message-ID: I cannot take out the sample stage from the chamber. It is in the exchange position w/ LCK sign. It seems the stage is not in the right position somehow. After loading my sample, when I tried to move the Z position to 10mm using the command. At the time, the stage moved strangely, so I moved the z back to 30mm, which is the exchange position. And then, I moved it to 10mm. At the time, it looked OK. But, some how it is weird. So I followed the shutdown peocedure. The sample stage is in the exchange position. I turned off the beam, closed the SC airlock valve, opened the SEC valve, and inserted the rod. Up to now, it seems OK. But, when I tried to screw the rod, I cannot screw the rod tightly. And then, when I pulled the rod, the sample stage did not come out with the rod. I closed the SEC valve and leave the SEM in vacuum. Vacuum is fine. I shutdowned the tool and sent email to James and Ted. My sample still is in the SEM. Please unload my sample into the wafer cassette on the table. Thanks. From jwc at snf.stanford.edu Mon Mar 24 14:59:15 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 24 Mar 2008 14:59:15 -0700 Subject: Shutdown sem4160 SNF 2008-03-22 14:31:59: cannot unload sample Message-ID: retrieved sample holder from chamber -- cleanedsample holder and stage fixturing. metal wear debris found and cleaned up. back up for users JWC and Ted Berg From jwc at snf.stanford.edu Wed Mar 26 10:46:45 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 26 Mar 2008 10:46:45 -0700 Subject: Shutdown sem4160 SNF 2008-03-26 10:46:45: SC air lock valve switch broken Message-ID: Upon actuation the switch fell apart and will need to be replaced. Shutting down system until it can be replaced. James Conway From tberg at snf.stanford.edu Wed Mar 26 13:57:14 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Mar 2008 13:57:14 -0700 Subject: Shutdown sem4160 SNF 2008-03-26 10:46:45: SC air lock valve switch broken Message-ID: resoldered switch to PC board again. it is working OK now From crichter at snf.stanford.edu Thu Mar 27 19:32:17 2008 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 27 Mar 2008 19:32:17 -0700 Subject: Problem sem4160 SNF 2008-03-27 19:32:14: Hummer Not Working Properly Message-ID: My samples came out with a more gold color appearance (thicker gold film). I ran this process at 10mA. As I slowly turned the voltage knob to reach 10mA, I noticed that the needle (readout gage) was going slower than usual, but was able to reach 10mA. It looks like the current readout gage is stuck ...and that I need to prepare a new set of samples. From jwc at snf.stanford.edu Fri Mar 28 08:50:12 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 28 Mar 2008 08:50:12 -0700 Subject: Problem sem4160 SNF 2008-03-27 19:32:14: Hummer Not Working Properly Message-ID: