Problem sem4160 SNF 2008-03-02 00:25:35: Error message: air lock valve open

wwang at wwang at
Sun Mar 2 00:25:35 PST 2008

when I opened the SEC valve during unloading, an error message appeared on the control panel " air lock valve open", even though I have switched off the air lock valve. As a result, the SEC valve is interlocked and I couldn't take out my sample. 

More information about the sem4160-pcs mailing list