Shutdown sem4160 SNF 2008-05-02 03:44:27: Chuck is missing in the chamber

bilee at snf.stanford.edu bilee at snf.stanford.edu
Fri May 2 03:44:27 PDT 2008


After I load my sample, I move the stage from the center position with the joystick. Suddenly, the chuck disappeared from the CCD monitor and I cannot unload the sample. I hope I can get back my sample. It is very important. Thank you.




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