From ktorashima at snf.stanford.edu Thu Oct 16 23:12:47 2008 From: ktorashima at snf.stanford.edu (ktorashima at snf.stanford.edu) Date: Thu, 16 Oct 2008 23:12:47 -0700 Subject: Shutdown sem4160 SNF 2008-10-16 23:12:46: specimen holder fell in chamber Message-ID: After I finished imaging my sample, I pressed Mode 01 to return to exchange position, so I could remove my sample. While automatically returning to exchange position, the specimen holder fell into the chamber. Unable to remove the specimen holder now. From tberg at snf.stanford.edu Fri Oct 17 08:11:44 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 17 Oct 2008 08:11:44 -0700 Subject: Shutdown sem4160 SNF 2008-10-16 23:12:46: specimen holder fell in chamber Message-ID: Vented chamber, retreived holder and reinstalled. pumped system back down,homed stage. Back in high vac From jwc at snf.stanford.edu Thu Oct 23 14:42:01 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 23 Oct 2008 14:42:01 -0700 Subject: Comment sem4160 SNF 2008-10-23 14:42:00: many SEM studs and cross section fixtures have diappeared. Message-ID: From jwc at snf.stanford.edu Fri Oct 31 13:49:26 2008 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 31 Oct 2008 13:49:26 -0700 Subject: Comment sem4160 SNF 2008-10-31 13:49:25: SEM stage wafer holder found scraped and scratched and numbered ;-( Message-ID: I am disappointed to discover that the SEM stage wafer holder was very damaged by an uneducated User. This person took it upon himself to use a razor blade to scrape carbon dots off the holders surface severely scratching the surface of this fixture. The was a precision machined flat with a very smooth surface, that was coplanar polished to the base of the fixture in order to maintain precise focus for users working on wafers. I cleaned the chuck of metal scrapings, filings, and carbon dot residues and inspected its surface. I then discovered that they had scribed numbers into the sample surface in the hole positions further damaging the surface planarity and flatness. If you are this User please meet with me during my office hour. James Conway