From iwjung at snf.stanford.edu Tue Aug 4 18:06:46 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Tue, 4 Aug 2009 18:06:46 -0700 Subject: Problem sem4160 SNF 2009-08-04 18:06:45: Unable to get good image Message-ID: From tberg at snf.stanford.edu Wed Aug 5 06:34:42 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 5 Aug 2009 06:34:42 -0700 Subject: Problem sem4160 SNF 2009-08-04 18:06:45: Unable to get good image Message-ID: Got image just fine From jwc at snf.stanford.edu Wed Aug 5 16:58:06 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 5 Aug 2009 16:58:06 -0700 Subject: Comment sem4160 SNF 2009-08-05 16:58:05: adjusted condensor lens back to spot size 10 Message-ID: Over the last two days some users have reported problems with the column alignment and not having an image to align the gun to a suitable sized gun aperture image. Upon closer inspection I found the condensor lens spot size set to 2 and not to the normal range of 10 to 14. I changed this back to Con. Lens setting 10 using 10keV and aperture plate hole no 3 at 10 mm WD. I realigned all sections of the column and all is now bright focused and properly stigmated again. :-) For new users, it is suggested to bring up the platform at the same acceleration voltage as had been used by the previous user, then obtain your initial SEM secondary electron image before making and significant changes to the column settings. This should make all SEM4160 operations sessions routine and not suffering from having to find the beam. Thank you for your support! James Conway From iwjung at snf.stanford.edu Thu Aug 6 00:56:41 2009 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Thu, 6 Aug 2009 00:56:41 -0700 Subject: Problem sem4160 SNF 2009-08-06 00:56:40: bad imaging Message-ID: It was superb this morning but now it isn't. From jwc at snf.stanford.edu Thu Aug 6 11:54:43 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 6 Aug 2009 11:54:43 -0700 Subject: Problem sem4160 SNF 2009-08-06 00:56:40: bad imaging Message-ID: will check outy the system again this afternoon - operations issue with the specific user(s) From zpatel at snf.stanford.edu Fri Aug 7 15:30:54 2009 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Fri, 7 Aug 2009 15:30:54 -0700 Subject: Problem sem4160 SNF 2009-08-07 15:30:53: No stage Imageat 50X magnification Message-ID: There is not even the intial stage image at 50X magnification. From mmessana at snf.stanford.edu Sat Aug 8 12:48:23 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Sat, 8 Aug 2009 12:48:23 -0700 Subject: Comment sem4160 SNF 2009-08-08 12:48:23: Beam possibly out of alignment Message-ID: The image of the stage shows up fine, but could not align aperature to stop image movement while focusing. From kupnik at snf.stanford.edu Sun Aug 9 17:12:02 2009 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Sun, 9 Aug 2009 17:12:02 -0700 Subject: Problem sem4160 SNF 2009-08-09 17:12:02: does not work Message-ID: I also was not able to get a picture on the screen From tberg at snf.stanford.edu Mon Aug 10 08:09:15 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Aug 2009 08:09:15 -0700 Subject: Comment sem4160 SNF 2009-08-10 08:09:14: Did slight adjustment on alignment Message-ID: Did slight adjustment on alignment. had reasonable image will keep open for observation. From nharjee at snf.stanford.edu Wed Aug 12 14:37:29 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Wed, 12 Aug 2009 14:37:29 -0700 Subject: Problem sem4160 SNF 2009-08-12 14:37:28: No image Message-ID: James and/or Ted please take a look. This tool is not functional. From kupnik at snf.stanford.edu Wed Aug 12 21:50:42 2009 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Wed, 12 Aug 2009 21:50:42 -0700 Subject: Shutdown sem4160 SNF 2009-08-12 21:50:41: stage slided off Message-ID: I did SEM and for some reason the stage slided off just before I wanted to unload my wafer. I had it at 45 degree angle, and wanted to rotate the stage back. I left my empty wafer tray at the SEM. Please put my wafer in this tray after recovery. Also, the small Allen Key is still missing. There was a very small one for putting samples in a vertical position. Thanks. From tberg at snf.stanford.edu Thu Aug 13 10:17:29 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Aug 2009 10:17:29 -0700 Subject: Shutdown sem4160 SNF 2009-08-12 21:50:41: stage slided off Message-ID: Recovered stage from inside chamber-had to vent the whole system, re installed stage. Checked image looks OK From tberg at snf.stanford.edu Thu Aug 13 10:17:40 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Aug 2009 10:17:40 -0700 Subject: Problem sem4160 SNF 2009-08-12 14:37:28: No image Message-ID: Recovered stage from inside chamber-had to vent the whole system, re installed stage. Checked image looks OK From tberg at snf.stanford.edu Thu Aug 13 10:18:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Aug 2009 10:18:18 -0700 Subject: Problem sem4160 SNF 2009-08-09 17:12:02: does not work Message-ID: Recovered stage from inside chamber-had to vent the whole system, re installed stage. Checked image looks OK From tberg at snf.stanford.edu Thu Aug 13 10:18:38 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Aug 2009 10:18:38 -0700 Subject: Problem sem4160 SNF 2009-08-07 15:30:53: No stage Imageat 50X magnification Message-ID: Recovered stage from inside chamber-had to vent the whole system, re installed stage. Checked image looks OK From kupnik at snf.stanford.edu Tue Aug 18 16:29:46 2009 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Tue, 18 Aug 2009 16:29:46 -0700 Subject: Comment sem4160 SNF 2009-08-18 16:29:45: I put a new allen key they Message-ID: Because an allen key works better than a tooth pick, I walked to the physics store and bought a new one. For the clown who always loses it: If you do it again, it takes you 5 min to get a new one and the correct size is 0.035 inch. Please be fair and replace it when you decide to drop it again. Thanks From jwc at snf.stanford.edu Tue Aug 18 17:36:37 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 18 Aug 2009 17:36:37 -0700 Subject: Problem sem4160 SNF 2009-08-18 17:36:37: aperture strip misaligned mechanicaly to the selection numbers Message-ID: New User issues from user working over the weekend... the movable aperture strip is misaligned mechanicaly to the selection numbers and is not going through any hole nor can I find them. Ted may be more successful in finding the holes or the strip may be replaced. Users are requested to not force or run out the alignment knobs to or beyond the mechanical stops. Currently we do not have any suitable resolution for imaging on this tool. JWC From tberg at snf.stanford.edu Wed Aug 19 07:43:12 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Aug 2009 07:43:12 -0700 Subject: Comment sem4160 SNF 2009-08-19 07:43:12: Made a slight adjustment to aperature Message-ID: Made a slight adjustment to aperature settings image looks OK. please comment on images. thanks,ted From tberg at snf.stanford.edu Wed Aug 19 11:05:42 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Aug 2009 11:05:42 -0700 Subject: Comment sem4160 SNF 2009-08-19 11:05:41: FS will be in tomorrow to check it out Message-ID: From jwc at snf.stanford.edu Wed Aug 19 14:41:50 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 19 Aug 2009 14:41:50 -0700 Subject: Shutdown sem4160 SNF 2009-08-19 14:41:50: no movable aperture strip functionality Message-ID: From jwc at snf.stanford.edu Wed Aug 19 14:48:42 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 19 Aug 2009 14:48:42 -0700 Subject: Shutdown sem4160 SNF 2009-08-19 14:41:50: no movable aperture strip functionality Message-ID: From jwc at snf.stanford.edu Wed Aug 19 14:49:04 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 19 Aug 2009 14:49:04 -0700 Subject: Problem sem4160 SNF 2009-08-19 14:49:04: Movable aperture strip not in alignment or present Message-ID: From tberg at snf.stanford.edu Thu Aug 20 11:19:08 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:19:08 -0700 Subject: Problem sem4160 SNF 2009-08-19 14:49:04: Movable aperture strip not in alignment or present Message-ID: FS in and image is now beautiful From tberg at snf.stanford.edu Thu Aug 20 11:19:39 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:19:39 -0700 Subject: Problem sem4160 SNF 2009-08-18 17:36:37: aperture strip misaligned mechanicaly to the selection numbers Message-ID: FS checked out and improved image From tberg at snf.stanford.edu Thu Aug 20 11:19:59 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:19:59 -0700 Subject: Comment sem4160 SNF 2009-08-08 12:48:23: Beam possibly out of alignment Message-ID: FS checked out and improved image From tberg at snf.stanford.edu Thu Aug 20 11:20:09 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:20:09 -0700 Subject: Comment sem4160 SNF 2009-08-19 11:05:41: FS will be in tomorrow to check it out Message-ID: FS checked out and improved image From tberg at snf.stanford.edu Thu Aug 20 11:20:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:20:18 -0700 Subject: Comment sem4160 SNF 2009-08-19 07:43:12: Made a slight adjustment to aperature Message-ID: FS checked out and improved image From tberg at snf.stanford.edu Thu Aug 20 11:20:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:20:31 -0700 Subject: Comment sem4160 SNF 2009-08-10 08:09:14: Did slight adjustment on alignment Message-ID: FS checked out and improved image From tberg at snf.stanford.edu Thu Aug 20 11:20:51 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:20:51 -0700 Subject: Comment sem4160 SNF 2009-08-05 16:58:05: adjusted condensor lens back to spot size 10 Message-ID: FS checked out and improved image From tberg at snf.stanford.edu Thu Aug 20 11:21:05 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 20 Aug 2009 11:21:05 -0700 Subject: Comment sem4160 SNF 2009-08-18 16:29:45: I put a new allen key they Message-ID: noted From druist at snf.stanford.edu Wed Aug 26 09:52:28 2009 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Wed, 26 Aug 2009 09:52:28 -0700 Subject: Problem sem4160 SNF 2009-08-26 09:52:28: emission current erratic Message-ID: imaging was good, but the emmision current was behaving erratically. Specifically, when the current would drift down & I'd press the on button to bring it backup to the usual 12 uA. Sometimes the current would go up to 24 uA, sometimes it would go to zero. Turnining the emmission off & on one or two times would get the emmission back to the usual value. From jwc at snf.stanford.edu Wed Aug 26 10:04:36 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 26 Aug 2009 10:04:36 -0700 Subject: Problem sem4160 SNF 2009-08-26 09:52:28: emission current erratic Message-ID: From jwc at snf.stanford.edu Thu Aug 27 15:16:18 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 27 Aug 2009 15:16:18 -0700 Subject: Comment sem4160 SNF 2009-08-27 15:16:17: vibration evident in the images Message-ID: Ted: Is there pneumatic vibration isolation pads on the sem4160? Could you check them as they may need to be represurized... We are observing increased vibration levels during imqaging on this tool. FWHM > 100 nm Peak to Peak Thank you JWC From jwc at snf.stanford.edu Fri Aug 28 12:08:41 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 28 Aug 2009 12:08:41 -0700 Subject: Shutdown sem4160 SNF 2009-08-28 12:08:40: recovering from power failure 1 PM best guess Message-ID: Lost the motor control to stage and scanning sections of instrument are down. rebooting the entire hardware to eproms and analog display sections of teh analog control sections never a dull moment From jwc at snf.stanford.edu Fri Aug 28 12:39:27 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 28 Aug 2009 12:39:27 -0700 Subject: Shutdown sem4160 SNF 2009-08-28 12:08:40: recovering from power failure 1 PM best guess Message-ID: back up after resetting hardware and check movements of stage. Improved brightness and FEGUN emission checked SEM functions seem OK JWC From jwc at snf.stanford.edu Fri Aug 28 14:36:18 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 28 Aug 2009 14:36:18 -0700 Subject: Comment sem4160 SNF 2009-08-27 15:16:17: vibration evident in the images Message-ID: