Shutdown sem4160 SNF 2009-08-12 21:50:41: stage slided off

kupnik at snf.stanford.edu kupnik at snf.stanford.edu
Wed Aug 12 21:50:42 PDT 2009


I did SEM and for some reason the stage slided off just before
I wanted to unload my wafer. I had it at 45 degree angle, and
wanted to rotate the stage back.
I left my empty wafer tray at the SEM. Please put my wafer in this
tray after recovery. 
Also, the small Allen Key is still missing. There was a very
small one for putting samples in a vertical position.
Thanks.




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