Comment sem4160 SNF 2009-08-27 15:16:17: vibration evident in the images

jwc at jwc at
Thu Aug 27 15:16:18 PDT 2009

Is there pneumatic vibration isolation pads on the sem4160?  Could you check them as they may need to be represurized...
We are observing increased vibration levels during imqaging on this tool.  FWHM > 100 nm Peak to Peak
Thank you

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