From dgunning at snf.stanford.edu Wed Nov 4 14:19:30 2009 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Wed, 4 Nov 2009 14:19:30 -0800 Subject: Comment sem4160 SNF 2009-11-04 14:19:29: Message-ID: From jwc at snf.stanford.edu Wed Nov 4 15:03:33 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 4 Nov 2009 15:03:33 -0800 Subject: Comment sem4160 SNF 2009-11-04 15:03:33: realigned and saved settings for 5, 10, 20, and 30 keV for users Message-ID: This afternoon I realigned the apertures for the SEM column and saved settings for 5, 10, 20, and 30 keV for Users reference. Syystem imaging in an optimal state woth sun 10 nm resolution on Carbon tape debris and the actual stage scratches itself. REsponding to performance concern by debbie Gunning after a previous User had used the system at 1 keV. Not a problem... JWC From tberg at snf.stanford.edu Thu Nov 5 07:07:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 Nov 2009 07:07:00 -0800 Subject: Comment sem4160 SNF 2009-11-04 14:19:29: Message-ID: From rostam at snf.stanford.edu Fri Nov 6 00:31:56 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 6 Nov 2009 00:31:56 -0800 Subject: Problem sem4160 SNF 2009-11-06 00:31:55: SEC valvel Message-ID: occasionally SEC valve doesn't close completely and there is hissing sound From rostam at snf.stanford.edu Fri Nov 6 00:35:01 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 6 Nov 2009 00:35:01 -0800 Subject: Problem sem4160 SNF 2009-11-06 00:35:00: valve is OK now. I might happen again later. Message-ID: From jwc at snf.stanford.edu Fri Nov 6 10:07:42 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 6 Nov 2009 10:07:42 -0800 Subject: Problem sem4160 SNF 2009-11-06 00:35:00: valve is OK now. I might happen again later. Message-ID: From jwc at snf.stanford.edu Fri Nov 6 10:07:45 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 6 Nov 2009 10:07:45 -0800 Subject: Problem sem4160 SNF 2009-11-06 00:31:55: SEC valvel Message-ID: From kyunglok at snf.stanford.edu Mon Nov 16 22:34:59 2009 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Mon, 16 Nov 2009 22:34:59 -0800 Subject: Problem sem4160 SNF 2009-11-16 22:34:58: Probe may not work Message-ID: When I started to use this machine, something was not usual. The screen could not detect anything on my sample and the vision was hardly seen. I even could not cotrol the contrast. I wonder the probe has a problem. I hope to know whether the previous user has experienced same situation. From tberg at snf.stanford.edu Tue Nov 17 08:00:12 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Nov 2009 08:00:12 -0800 Subject: Problem sem4160 SNF 2009-11-16 22:34:58: Probe may not work Message-ID: checked ok saw stage features fine From jwc at snf.stanford.edu Wed Nov 18 13:36:21 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 18 Nov 2009 13:36:21 -0800 Subject: Comment sem4160 SNF 2009-11-18 13:36:21: Found broken and scribed wafer peices on load deck floor and under SEM Message-ID: Major scofflaw in cleanroom practice! Found broken and scribed wafer peices on load deck, the Ebeam lab floor and under SEM area. user either scribeed up a wafer (not allowed in the Ebeam Lab) or simply broke a wafer and swept the scraps under the SEM platform. Tweezer box said LUDWIG Coral HIstory stated last user was ROSTAM. System was left with the load Lock exchange chamber vented to air Will insist on retraining session for both these users and will send out a clarification email to all users related to scribe and breaking not allowed in the SNF cleanroom areas. Dirty operation of this kind should be performed in the SAW area or in the other SEM Lab ALLEN 151A From jwc at snf.stanford.edu Wed Nov 18 16:28:07 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:28:07 -0800 Subject: Comment sem4160 SNF 2009-11-18 13:36:21: Found broken and scribed wafer peices on load deck floor and under SEM Message-ID: addressed issues with ROSTAM now resolved... From jwc at snf.stanford.edu Wed Nov 18 16:28:22 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 18 Nov 2009 16:28:22 -0800 Subject: Comment sem4160 SNF 2009-11-04 15:03:33: realigned and saved settings for 5, 10, 20, and 30 keV for users Message-ID: archived