Problem sem4160 SNF 2010-07-29 23:08:56: bad smell

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Thu Jul 29 23:08:57 PDT 2010


strong smell in all the litho area, and guess it comes from the ebeam area, because there is stronger smell than any other places. 




More information about the sem4160-pcs mailing list