From cachang at snf.stanford.edu Thu Aug 4 15:49:14 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Thu, 4 Aug 2011 15:49:14 -0700 Subject: Problem sem4160 SNF 2011-08-04 15:49:14: No beam Message-ID: After loading the wafer into the chamber, the left monitor showed "please flash" all the time. For the first 5 mins, I can see my devices, and then the machine turned the beam off. I cannot turn the beam on any more. From mtan at snf.stanford.edu Thu Aug 4 17:47:03 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Thu, 4 Aug 2011 17:47:03 -0700 Subject: Comment sem4160 SNF 2011-08-04 17:47:03: it's working fine Message-ID: From tberg at snf.stanford.edu Fri Aug 5 06:10:54 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Aug 2011 06:10:54 -0700 Subject: Problem sem4160 SNF 2011-08-04 15:49:14: No beam Message-ID: later user reports no problem From wangss at snf.stanford.edu Fri Aug 19 12:36:25 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Fri, 19 Aug 2011 12:36:25 -0700 Subject: Problem sem4160 SNF 2011-08-19 12:36:24: HV can not be turned on Message-ID: HV went off during experiment all the sudden. It can not be turned on after that. "Please Flash" sign shows on the screen. From ysohn at snf.stanford.edu Fri Aug 19 13:29:32 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Fri, 19 Aug 2011 13:29:32 -0700 Subject: Comment sem4160 SNF 2011-08-19 13:29:31: HV issue by previous user Message-ID: resolved by pushing flash standby button From jwc at snf.stanford.edu Fri Aug 19 15:15:08 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:15:08 -0700 Subject: Problem sem4160 SNF 2011-08-19 12:36:24: HV can not be turned on Message-ID: isolation valve was not opend by user From jwc at snf.stanford.edu Fri Aug 19 15:15:20 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:15:20 -0700 Subject: Comment sem4160 SNF 2011-08-19 13:29:31: HV issue by previous user Message-ID: From jwc at snf.stanford.edu Fri Aug 19 15:15:25 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:15:25 -0700 Subject: Comment sem4160 SNF 2011-08-04 17:47:03: it's working fine Message-ID: From jwc at snf.stanford.edu Fri Aug 19 15:15:36 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:15:36 -0700 Subject: Comment sem4160 SNF 2011-07-14 08:10:05: Did not see any movement during imaging Message-ID: From jwc at snf.stanford.edu Fri Aug 19 15:16:07 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 19 Aug 2011 15:16:07 -0700 Subject: Comment sem4160 SNF 2011-06-27 11:26:57: tv mode Message-ID: user training issue press channel A button to get tio active screen From dwnam at snf.stanford.edu Sat Aug 20 00:13:03 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Sat, 20 Aug 2011 00:13:03 -0700 Subject: Comment sem4160 SNF 2011-08-20 00:13:02: SEC Pumpdown problem Message-ID: SEC vacuum state does not reach high. From shott at snf.stanford.edu Sat Aug 20 12:57:13 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 20 Aug 2011 12:57:13 -0700 Subject: Comment sem4160 SNF 2011-08-20 00:13:02: SEC Pumpdown problem Message-ID: Andrew Graham resolved this problem. He found carbon dots attached to the O-ring. Here is his message: Hi Donguk, I found the paper backside of one of the carbon sticky dots stuck to the O-ring on the part underneath the stage. Once I removed it, it pumped down just fine. This should be a good reminder to all users as to why it's important to clean up any mess you might make (I found about 6 of those paper dots on top of the SEC). It can and (based on Donguk's experience) does get in the way of other users ability to use equipment. Happy SEM'ing everyone, Andrew