Problem sem4160 SNF 2011-08-04 15:49:14: No beam

cachang at snf.stanford.edu cachang at snf.stanford.edu
Thu Aug 4 15:49:14 PDT 2011


After loading the wafer into the chamber, the left monitor showed "please flash" all the time. For the first 5 mins, I can see my devices, and then the machine turned the beam off. I cannot turn the beam on any more.




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