Problem sem4160 SNF 2011-08-04 15:49:14: No beam

cachang at cachang at
Thu Aug 4 15:49:14 PDT 2011

After loading the wafer into the chamber, the left monitor showed "please flash" all the time. For the first 5 mins, I can see my devices, and then the machine turned the beam off. I cannot turn the beam on any more.

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