From tberg at snf.stanford.edu Tue Feb 1 06:39:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 06:39:25 -0800 Subject: Comment sem4160 SNF 2011-02-01 06:39:25: Installing new tip Today Message-ID: Installing new tip Today it will be down at least a couple of days for vacuum and bake. From tberg at snf.stanford.edu Tue Feb 1 14:10:43 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:10:43 -0800 Subject: Problem sem4160 SNF 2011-01-12 10:39:47: Tilt not functioning Message-ID: Tilt is functional at this time From tberg at snf.stanford.edu Tue Feb 1 14:12:16 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:12:16 -0800 Subject: Problem sem4160 SNF 2011-01-21 12:08:58: Not able to flash tip Message-ID: Reconnected Gun cable cleaned connections. Tip flashes fine now.Current is 5.2 adjusted beam aperatures looks good now From tberg at snf.stanford.edu Tue Feb 1 14:12:27 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:12:27 -0800 Subject: Problem sem4160 SNF 2011-01-25 16:16:15: HV flashing and emission curcuit non functional Message-ID: Reconnected Gun cable cleaned connections. Tip flashes fine now.Current is 5.2 adjusted beam aperatures looks good now From tberg at snf.stanford.edu Tue Feb 1 14:12:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:12:56 -0800 Subject: Problem sem4160 SNF 2011-01-26 18:22:23: HV adjust light flashes continuously Message-ID: Reconnected Gun cable cleaned connections. Tip flashes fine now.Current is 5.2 adjusted beam aperatures looks good now From tberg at snf.stanford.edu Tue Feb 1 14:13:09 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:13:09 -0800 Subject: Problem sem4160 SNF 2011-01-27 15:54:16: Please fix tool Message-ID: Reconnected Gun cable cleaned connections. Tip flashes fine now.Current is 5.2 adjusted beam aperatures looks good now From tberg at snf.stanford.edu Tue Feb 1 14:13:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:13:23 -0800 Subject: Comment sem4160 SNF 2011-01-28 08:38:24: New tip is on oder Message-ID: Reconnected Gun cable cleaned connections. Tip flashes fine now.Current is 5.2 adjusted beam aperatures looks good now From tberg at snf.stanford.edu Tue Feb 1 14:13:35 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:13:35 -0800 Subject: Comment sem4160 SNF 2011-02-01 06:39:25: Installing new tip Today Message-ID: Reconnected Gun cable cleaned connections. Tip flashes fine now.Current is 5.2 adjusted beam aperatures looks good now From jwc at snf.stanford.edu Wed Feb 2 11:53:04 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 2 Feb 2011 11:53:04 -0800 Subject: Problem sem4160 SNF 2011-01-26 11:07:06: unacceptable imaging brightness and resolution Message-ID: Changes to Gun cable and anything else performed did help improve resolution and brightness of this tool. but still RES. is a factor or two to three over the system specifications. resolution found today at 150 and 300 kX Mag. 5 KV apt 3 at 11 mm WD = 15 to 20 nm min. resolvable feature (FWHM 50% on Sn on Au std.) 10KV apt 3 at 11 mm WD = 14 nm 10 KV apt 4 at 11 mm WD = 10 - 12 nm Still desire to have a full column PM performed: New FE-Gun Tip and inspection of ceramic mount, clean aperture liner tube and install new apertures (2 or 3?) New 4 hole aperture strip clean final aperture and inspect pole piece for debris. Stage needs to be tightened up in both axis with significant shift in X, i.e., drift and skate during HRes. imaging above 150KX. making all CD measurements difficult. Most Users will be happy returning to the system. ready for all users today JWC From jwc at snf.stanford.edu Wed Feb 2 11:53:27 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 2 Feb 2011 11:53:27 -0800 Subject: Problem sem4160 SNF 2011-01-26 11:09:40: max usable magnification is ~ 50 KX Message-ID: maximun usable mag is now 300 kx From jwc at snf.stanford.edu Wed Feb 2 11:53:41 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 2 Feb 2011 11:53:41 -0800 Subject: Comment sem4160 SNF 2011-01-07 16:27:28: system brightness is not sufficient for resolution test Message-ID: From takashifuse at snf.stanford.edu Fri Feb 4 10:15:45 2011 From: takashifuse at snf.stanford.edu (takashifuse at snf.stanford.edu) Date: Fri, 4 Feb 2011 10:15:45 -0800 Subject: Comment sem4160 SNF 2011-02-04 10:15:44: Aliginment Message-ID: Someone completly had moved off the aperture. I have tried to back to center. But I think it's not perfect. Now SEM4160 can get x100 magnification with 30kV Acc. If need more high magnification image, please ask James. Thank you From srikantv at snf.stanford.edu Tue Feb 8 20:23:44 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 8 Feb 2011 20:23:44 -0800 Subject: Problem sem4160 SNF 2011-02-08 20:23:43: beam not aligned properly Message-ID: From jwc at snf.stanford.edu Wed Feb 9 11:20:35 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 9 Feb 2011 11:20:35 -0800 Subject: Problem sem4160 SNF 2011-02-08 20:23:43: beam not aligned properly Message-ID: checked and found beam alignment aperture alignment and stugmation all set nearly perfectly. My guess is User did not locate his sample or feature in SEM view and may have been examining sharpie mark pen spot on stage at high mag. This woulsd appear very dark and perhaps he thoiught the Gun al;ignment was out of the aperture in the gun align view... resolved and cleared from CORAL jwc From jwc at snf.stanford.edu Wed Feb 9 11:20:53 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 9 Feb 2011 11:20:53 -0800 Subject: Comment sem4160 SNF 2011-02-04 10:15:44: Aliginment Message-ID: From dkozak at snf.stanford.edu Wed Feb 9 21:58:28 2011 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Wed, 9 Feb 2011 21:58:28 -0800 Subject: Problem sem4160 SNF 2011-02-09 21:58:27: Right (camera) screen is off Message-ID: Right screen was on and working properly. Moved the stage into the chamber and moved the stage to 75, 75 (center position). While the stage was moving, the screen blinked and turned off. Switching the screen to SEM mode works -- it displays propely the same as left screen. When switching back to camera mode, doesn't display anything again. From xuanwu at snf.stanford.edu Thu Feb 10 01:53:35 2011 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Thu, 10 Feb 2011 01:53:35 -0800 Subject: Comment sem4160 SNF 2011-02-10 01:53:34: Right (camera) screen Message-ID: seems to be working fine when I used it... From jwc at snf.stanford.edu Thu Feb 10 09:02:54 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 10 Feb 2011 09:02:54 -0800 Subject: Comment sem4160 SNF 2011-02-10 01:53:34: Right (camera) screen Message-ID: From jwc at snf.stanford.edu Thu Feb 10 09:02:57 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 10 Feb 2011 09:02:57 -0800 Subject: Problem sem4160 SNF 2011-02-09 21:58:27: Right (camera) screen is off Message-ID: From xuanwu at snf.stanford.edu Fri Feb 18 02:41:55 2011 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 18 Feb 2011 02:41:55 -0800 Subject: Problem sem4160 SNF 2011-02-18 02:41:54: chip shattered inside Message-ID: Seems like the chip cleared the outer entrance but not the inside door. There are a couple of pieces inside the chamber (visible on the camera) and several in the passageway from the SEC to the SC (some are too big to be mine). From jwc at snf.stanford.edu Tue Feb 22 10:04:57 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 22 Feb 2011 10:04:57 -0800 Subject: Problem sem4160 SNF 2011-02-18 02:41:54: chip shattered inside Message-ID: nothing found From wangss at snf.stanford.edu Sun Feb 27 17:19:59 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sun, 27 Feb 2011 17:19:59 -0800 Subject: Shutdown sem4160 SNF 2011-02-27 17:19:58: Message-ID: From wangss at snf.stanford.edu Sun Feb 27 17:21:11 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sun, 27 Feb 2011 17:21:11 -0800 Subject: Comment sem4160 SNF 2011-02-27 17:21:10: SEM4160 is fine Message-ID: I accidently shut it down. Please bring it online. Thanks very much. From eperalta at snf.stanford.edu Mon Feb 28 17:45:47 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Mon, 28 Feb 2011 17:45:47 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 17:45:47: Message-ID: From eperalta at snf.stanford.edu Mon Feb 28 17:50:22 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Mon, 28 Feb 2011 17:50:22 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 17:50:22: Message-ID: From eperalta at snf.stanford.edu Mon Feb 28 17:50:56 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Mon, 28 Feb 2011 17:50:56 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 17:50:56: please bring up the sem! Message-ID: From eperalta at snf.stanford.edu Mon Feb 28 18:00:04 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Mon, 28 Feb 2011 18:00:04 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 18:00:03: Message-ID: From shott at snf.stanford.edu Mon Feb 28 18:24:37 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 28 Feb 2011 18:24:37 -0800 Subject: Comment sem4160 SNF 2011-02-27 17:21:10: SEM4160 is fine Message-ID: Shutdown by mistake .... John From shott at snf.stanford.edu Mon Feb 28 18:24:47 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 28 Feb 2011 18:24:47 -0800 Subject: Shutdown sem4160 SNF 2011-02-27 17:19:58: Message-ID: Shutdown by mistake .... John From shott at snf.stanford.edu Mon Feb 28 18:24:53 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 28 Feb 2011 18:24:53 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 17:45:47: Message-ID: Shutdown by mistake .... John From shott at snf.stanford.edu Mon Feb 28 18:25:00 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 28 Feb 2011 18:25:00 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 17:50:22: Message-ID: Shutdown by mistake .... John From shott at snf.stanford.edu Mon Feb 28 18:25:07 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 28 Feb 2011 18:25:07 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 17:50:56: please bring up the sem! Message-ID: Shutdown by mistake .... John From shott at snf.stanford.edu Mon Feb 28 18:25:14 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 28 Feb 2011 18:25:14 -0800 Subject: Shutdown sem4160 SNF 2011-02-28 18:00:03: Message-ID: Shutdown by mistake .... John