Problem sem4160 SNF 2011-02-08 20:23:43: beam not aligned properly

jwc at snf.stanford.edu jwc at snf.stanford.edu
Wed Feb 9 11:20:35 PST 2011


checked and found beam alignment aperture alignment and stugmation all set nearly perfectly.
My guess is User did not locate his sample or feature in SEM view and may have been examining sharpie mark pen spot on stage at high mag.  This woulsd appear very dark and perhaps he thoiught the Gun al;ignment was out of the aperture in the gun align view...
resolved and cleared from CORAL
jwc




More information about the sem4160-pcs mailing list