From coop at snf.stanford.edu Tue Jan 4 18:24:11 2011 From: coop at snf.stanford.edu (coop at snf.stanford.edu) Date: Tue, 4 Jan 2011 18:24:11 -0800 Subject: Problem sem4160 SNF 2011-01-04 18:24:11: no image on computer Message-ID: I was unable to see or record images on the Quartz PCI application computer. It scanned but there was no image of the SEM picture that was on the SEM left screen. From tberg at snf.stanford.edu Wed Jan 5 08:25:14 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 5 Jan 2011 08:25:14 -0800 Subject: Problem sem4160 SNF 2011-01-04 18:24:11: no image on computer Message-ID: repaired broken wire to computer From jwc at snf.stanford.edu Thu Jan 6 09:22:50 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 6 Jan 2011 09:22:50 -0800 Subject: Comment sem4160 SNF 2010-11-30 04:21:47: No more carbon black dots Message-ID: From jwc at snf.stanford.edu Thu Jan 6 09:22:56 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 6 Jan 2011 09:22:56 -0800 Subject: Comment sem4160 SNF 2010-12-14 11:36:58: resolution ok Message-ID: From jwc at snf.stanford.edu Thu Jan 6 09:23:12 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 6 Jan 2011 09:23:12 -0800 Subject: Comment sem4160 SNF 2010-12-14 18:50:01: SEM Message-ID: From jwc at snf.stanford.edu Fri Jan 7 16:27:29 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Fri, 7 Jan 2011 16:27:29 -0800 Subject: Comment sem4160 SNF 2011-01-07 16:27:28: system brightness is not sufficient for resolution test Message-ID: did a sys check today. As reported by several users to me the FE-GUN Emission is normal but we don't see suitable beam current in normal ranges for each aperture selection. imaging appears very noisy and details other than kn topgraphic contrast is poor. Adjustments to stigmation controls have less of an effect than before the shutdown. recommend we consider getting a quote from Hitachi Field service to replace all the usual parts; anode aperture and aperture plate parts and install a new FE-GUN filament. I.E. a full column PM Several other sub-sections are also in need to evaluation or adjustment. Isolation pads are flat and need to be filled with N2 also... we can discuss this next week. JWC From jwc at snf.stanford.edu Mon Jan 10 16:20:09 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 10 Jan 2011 16:20:09 -0800 Subject: Comment sem4160 SNF 2011-01-10 16:20:08: qual session two Message-ID: today I observed bettern brightness than Friday afternoon, but with what i believe is less ultimate reslution than we should see on this tool. Took a number of resolution images at 1, 5, 10 , 30 kV and aperture 3 and 4. will evaluate tomorrow and report measurements to this list. JWC From xuanwu at snf.stanford.edu Mon Jan 10 20:42:26 2011 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Mon, 10 Jan 2011 20:42:26 -0800 Subject: Shutdown sem4160 SNF 2011-01-10 20:42:26: Tilt control stopped working Message-ID: And now can't get the specimen out. =[ From tberg at snf.stanford.edu Tue Jan 11 07:34:10 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 11 Jan 2011 07:34:10 -0800 Subject: Shutdown sem4160 SNF 2011-01-10 20:42:26: Tilt control stopped working Message-ID: homed all axis, removed stage to exchange chamber From jwc at snf.stanford.edu Tue Jan 11 18:32:14 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 11 Jan 2011 18:32:14 -0800 Subject: Comment sem4160 SNF 2011-01-11 18:32:14: linewidth cal at 100, 1000 and 10 kX mag. in specification Message-ID: Imaging field calibrations for linewidth on Geller MRS -3 NIST traceable line width and magnification standard measuring pitch are accurate to within 1% in X and less than 2.5% in Y for any magnification between 100 and 10000x. checked at 100, 1000, and 10000x magnification. no evident pincushion or skew distortion is apparent on the screen or image captures. We will need to use linewidth and pitch standards generated on the RAITH 150 to calibrate higher magnifications and to evaluate imaging field distortion. This is pending work within the Ebeam technology Groups Metrology section activities... stay tuned, James Conway Jan. 11 2011 18:00 hours From xuanwu at snf.stanford.edu Tue Jan 11 19:58:42 2011 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Tue, 11 Jan 2011 19:58:42 -0800 Subject: Problem sem4160 SNF 2011-01-11 19:58:42: Tilt is not working Message-ID: But no problem putting in and removing specimens. From jwc at snf.stanford.edu Wed Jan 12 10:03:23 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 12 Jan 2011 10:03:23 -0800 Subject: Problem sem4160 SNF 2011-01-11 19:58:42: Tilt is not working Message-ID: From jwc at snf.stanford.edu Wed Jan 12 10:39:48 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 12 Jan 2011 10:39:48 -0800 Subject: Problem sem4160 SNF 2011-01-12 10:39:47: Tilt not functioning Message-ID: tested TILT AND IT IS NOT FUNCTIONING LIKELY SHAFT IS DISCONNECTED... JWC From tberg at snf.stanford.edu Thu Jan 13 08:48:37 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Jan 2011 08:48:37 -0800 Subject: Comment sem4160 SNF 2011-01-13 08:48:36: Motor for tilt not moving Message-ID: Motor for tilt not moving. shaft is not slipping. will call for expert adviceand possibly Field service. ted From eperalta at snf.stanford.edu Fri Jan 21 12:08:59 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 21 Jan 2011 12:08:59 -0800 Subject: Problem sem4160 SNF 2011-01-21 12:08:58: Not able to flash tip Message-ID: Vext stays at 6.5 kV. I flash and turn on again but the Vext stays unchanged. Also, emission current displays 0 uA even when its clear there's a beam since there's an image. From jwc at snf.stanford.edu Tue Jan 25 16:16:15 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 25 Jan 2011 16:16:15 -0800 Subject: Problem sem4160 SNF 2011-01-25 16:16:15: HV flashing and emission curcuit non functional Message-ID: checked system out on Ted Berg's request. Unable to flash FE-TIP and no reading on extraction current meter. Extraction voltage power supply is at maximun alllowed value 6.5kV. This could indicate the tip is about to die or a component or relay in the flashing curcuit has drifted beyond tolerance or failed. Likely we will need Hitachi Field Service support to reach a proper solution in timely manner as we have not ever seen this issue oon Hitachi SEM's before. JWC From jwc at snf.stanford.edu Wed Jan 26 11:07:07 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:07:07 -0800 Subject: Problem sem4160 SNF 2011-01-26 11:07:06: unacceptable imaging brightness and resolution Message-ID: Good morning, Curernt state of the tool is poor for brightness and resolution. evaluation of min resolvable features at 30 keV acc.voltage can only resolve to 32 nm line and space at 5 mm in X and ~ 44 nm in Y axis for slow scans (spped No 4) normal resolution for both axis is on the order of 6 to 9 nm at any acc. voltage. system specification is less than 3.5 nm. Time for a complete PM after resolving the extraction voltage and emmission problems in the curcuit or board level. This may simply be that the FE-Tip has reached the end of its useful life as we can neither flash the tip or obtain an image at lower extraction voltages. noted: I cannot obtain a stable beam current reading off the stage BNC grounding plug using my picoammeter. I tested this meter on the RAITH 150 last Friday and it is in proper calibration and working properly. Please request firld service for this tool to maintain Happy Users. From jwc at snf.stanford.edu Wed Jan 26 11:09:40 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:09:40 -0800 Subject: Problem sem4160 SNF 2011-01-26 11:09:40: max usable magnification is ~ 50 KX Message-ID: up until we ran into problems on this toll it was usable in high resolutiomn mode to 300kX. From coop at snf.stanford.edu Wed Jan 26 18:22:24 2011 From: coop at snf.stanford.edu (coop at snf.stanford.edu) Date: Wed, 26 Jan 2011 18:22:24 -0800 Subject: Problem sem4160 SNF 2011-01-26 18:22:23: HV adjust light flashes continuously Message-ID: No reading on Emission microamps Unable to flash filament Unusual contrast/brightness behavior Unable to focus From eperalta at snf.stanford.edu Thu Jan 27 15:54:16 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Thu, 27 Jan 2011 15:54:16 -0800 Subject: Problem sem4160 SNF 2011-01-27 15:54:16: Please fix tool Message-ID: Seems tool has been slowly degrading since the filament cannot be flashed. No able to focus at mag > 10kx anymore. From tberg at snf.stanford.edu Fri Jan 28 08:38:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 28 Jan 2011 08:38:25 -0800 Subject: Comment sem4160 SNF 2011-01-28 08:38:24: New tip is on oder Message-ID: From jwc at snf.stanford.edu Mon Jan 31 11:13:17 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 31 Jan 2011 11:13:17 -0800 Subject: Comment sem4160 SNF 2011-01-13 08:48:36: Motor for tilt not moving Message-ID: seemed to have resolved itself last week From jwc at snf.stanford.edu Mon Jan 31 11:13:32 2011 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 31 Jan 2011 11:13:32 -0800 Subject: Comment sem4160 SNF 2011-01-10 16:20:08: qual session two Message-ID: