Comment sem4160 SNF 2011-01-11 18:32:14: linewidth cal at 100, 1000 and 10 kX mag. in specification

jwc at snf.stanford.edu jwc at snf.stanford.edu
Tue Jan 11 18:32:14 PST 2011


Imaging field calibrations for linewidth on Geller MRS -3 NIST traceable line width and magnification standard measuring pitch are accurate to within 1% in X and less than 2.5% in Y for any magnification between 100 and 10000x. checked at 100, 1000, and 10000x magnification.  no evident pincushion or skew distortion is apparent on the screen or image captures.
  We will need to use linewidth and pitch standards generated on the RAITH 150 to calibrate higher magnifications and to evaluate imaging field distortion.  This is pending work within the Ebeam technology Groups Metrology section activities...
stay tuned,
James Conway
Jan. 11 2011 18:00 hours




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