From eldwin at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-09-16 19:48:17: SEC valve won't open Message-ID: <4974776.1.1347850097995.JavaMail.coral@shine> even though plate is at exchange position From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-09-16 19:48:17: SEC valve won't open Message-ID: <23644046.11.1347892217678.JavaMail.coral@shine> Load arm was not all the way out in detent. SEC valve opens fine From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-09-26 11:56:23: SEC valve switch is becoming loose in PC board Message-ID: <10848617.42.1348685783890.JavaMail.coral@shine> Hi Ted sem4160: The SEC valve switch is becoming loose in PC board resulting in some aberent cycling of the SEC valve when the front panel is touched or the column is bumped and may need to be resecured or mechanically reinforced. JWC From bchui at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-01 18:56:53: S.C. leak? Message-ID: <8025345.19.1349143013912.JavaMail.coral@shine> The S.C. vacuum goes to Yellow LED every now and then just sitting there, and also sometimes during sample exchange when the SEC valve is open. (It would eventually return to green after a few seconds when the pump kicks in and restores the vacuum.) From bchui at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-01 19:08:30: Problem likely with Air Lock Valve Message-ID: <2544951.20.1349143710433.JavaMail.coral@shine> It would give the 'Air Lock Valve Open' error just sitting there unenabled. If I enabled it briefly it would close and pump down again. From eldwin at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-02 11:30:41: beam alignment off Message-ID: <12361560.5.1349202642489.JavaMail.coral@shine> can't find the beam to align From bchui at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Shutdown sem4160 SNF 2012-10-02 17:03:23: beam alignment off (see prev post) Message-ID: <29095006.19.1349222604393.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-02 11:30:41: beam alignment off Message-ID: <22939192.7.1349281474752.JavaMail.coral@shine> aligned beam image is ok now From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Shutdown sem4160 SNF 2012-10-02 17:03:23: beam alignment off (see prev post) Message-ID: <25422181.8.1349281500001.JavaMail.coral@shine> aligned beam image is ok now From eldwin at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-03 18:31:25: unable to obtain good images Message-ID: <31958702.23.1349314286710.JavaMail.coral@shine> suspect beam/aperture alignments are off, needs recalibration From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-03 18:31:25: unable to obtain good images Message-ID: <20303649.31.1349365332114.JavaMail.coral@shine> adjusted beam again image is fine From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Shutdown sem4160 SNF 2012-10-04 12:48:12: lost aperture strip positions no resolution Message-ID: <15599751.36.1349380093028.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-10-04 13:07:00: FS will be in tomorrow Morning Message-ID: <30525463.37.1349381220820.JavaMail.coral@shine> Aperature Problem-poor resolution. FS will be in tomorrow Morning to look at it From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Shutdown sem4160 SNF 2012-10-04 12:48:12: lost aperture strip positions no resolution Message-ID: <10200626.9.1349458273016.JavaMail.coral@shine> Fs found aperatures and image looks good From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-10-04 13:07:00: FS will be in tomorrow Morning Message-ID: <1143493.10.1349458293219.JavaMail.coral@shine> Fs found aperature From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-01 18:56:53: S.C. leak? Message-ID: <18204363.19.1349468097106.JavaMail.coral@shine> this is a normal event over the past year due to trapped gas behind the slit valve or possibly a micro leak in the isolation bellows. seem this problem before on other S4100 series SEMS with prolonged age and operation time... to be disregarded for now From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-01 19:08:30: Problem likely with Air Lock Valve Message-ID: <7356647.20.1349468103173.JavaMail.coral@shine> From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-05 13:51:34: air lock valve loosen and chattering Message-ID: <29596850.29.1349470295200.JavaMail.coral@shine> From bchui at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-10-05 16:00:46: In very good shape after FS! Message-ID: <19689347.38.1349478047373.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-05 13:51:34: air lock valve loosen and chattering Message-ID: <9565.5.1349705413623.JavaMail.coral@shine> resoldered connection to air lock valve switch. it is solid now From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-09-26 11:56:23: SEC valve switch is becoming loose in PC board Message-ID: <23393155.6.1349705457033.JavaMail.coral@shine> resoldered connection to air lock valve switch. it is solid now From qran at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-08 21:18:44: "please flash" sign Message-ID: <18273377.11.1349756325649.JavaMail.coral@shine> "please flash" sign is on the screen. However, I didnt find anything abmornal with the system itself. From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-08 21:18:44: "please flash" sign Message-ID: <23417796.84.1349975208079.JavaMail.coral@shine> Just press flashing standby. User issue From mtan at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-30 13:06:06: found the system to be in vented state Message-ID: <19114525.68.1351627566815.JavaMail.coral@shine> From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-10-30 13:06:06: found the system to be in vented state Message-ID: <2111081.84.1351642654918.JavaMail.coral@shine> From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-10-05 16:00:46: In very good shape after FS! Message-ID: <4428580.85.1351642671946.JavaMail.coral@shine> From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-07-31 07:43:30: Added oil to both Mech pumps Message-ID: <22553482.86.1351642675953.JavaMail.coral@shine> From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-06 11:57:08: stage is getting sloppy in X axis Message-ID: <30000470.21.1352231829525.JavaMail.coral@shine> Stage is getting increasingly sloppy in X axis and we should plan to get some stage maintenance and adjustments to the X Y motion guide rails in th near term. Currently difficult to move in any axis direction accurately under joystick or control key panels. JWC From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-06 14:55:39: slight n2 or air hissing sound from inside panels Message-ID: <2770641.32.1352242540583.JavaMail.coral@shine> Ted User reported a slight sublime hissing sound coming from somewhere inside the lower chassis of the sem4160. Might be a loose ferrule or hose in the pneumatics. If you could please check it out for us. James From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-12 12:31:19: GeH4 is very low Message-ID: <31245258.10.1352752280689.JavaMail.coral@shine> GeH4 is very low. Do not run critical runs From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-12 12:31:19: GeH4 is very low Message-ID: <10827010.12.1352752334758.JavaMail.coral@shine> wrong tool sorry From insun at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: insun at snf.stanford.edu (insun at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-19 20:01:17: A cylndrical sample holder missing Message-ID: <13880032.14.1353384078189.JavaMail.coral@shine> I dropped a cylindrical sample holder and it went below the SEM machine. I could not get it out. From npapte at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-11-20 12:37:35: no electron beam Message-ID: <30035636.9.1353443856293.JavaMail.coral@shine> the beam disappeared while taking an image. tried to flash the turn it on again, but without success. From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-11-20 12:37:35: no electron beam Message-ID: <29913235.0.1353445081481.JavaMail.coral@shine> Flashed tip had beam no problem From cachang at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-11-27 23:35:27: Lost E-beam Message-ID: <11687282.28.1354088127733.JavaMail.coral@shine> Lost e-beam when I was imaging. Cound't turn on the e-beam. Also the image quality was not good. From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-11-27 23:35:27: Lost E-beam Message-ID: <21250841.5.1354127860112.JavaMail.coral@shine> no problem found beam is great From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-19 20:01:17: A cylndrical sample holder missing Message-ID: <18544571.6.1354127865169.JavaMail.coral@shine> From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-06 14:55:39: slight n2 or air hissing sound from inside panels Message-ID: <6723983.7.1354127869206.JavaMail.coral@shine> From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-11-06 11:57:08: stage is getting sloppy in X axis Message-ID: <1535718.8.1354127872243.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-12-05 09:59:26: SEM4160 is now on badger Message-ID: <7170720.5.1354730367363.JavaMail.coral@shine> Now no more "on"led we have a red for disabled and green for enabled. functionality is the same From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-12-05 15:45:30: badger enable error Message-ID: <6810629.48.1354751130617.JavaMail.coral@shine> hello Badger Users cannot enable on Badger for sem4160. error hardlock interfdace error. Please correct as Users cannot get onto the system... JWC and Paul Yoon From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Problem sem4160 SNF 2012-12-05 15:45:30: badger enable error Message-ID: <33301989.0.1354753517936.JavaMail.coral@shine> john shott connected network cable and restarted the service Good for users From cachang at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Shutdown sem4160 SNF 2012-12-11 16:40:05: beam alignment problem Message-ID: <23095497.14.1355272806187.JavaMail.coral@shine> When I came in, the alignment knob was turned to 0 (largest aperture). Beam was mis-aligned. James will take care of the alignment later. From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Shutdown sem4160 SNF 2012-12-11 16:40:05: beam alignment problem Message-ID: <15558112.6.1355281728426.JavaMail.coral@shine> on coming onto the system I found all the movable aperture strips moved to the extreme off set positions. EG the beam was off the strip and the image was lost due to the upper moveable aperture strip was also translated to off the hole position. refound the beam monitor aperture strip off center from normal position. recentered. Then aligned the movable aperture strip after relocating the lost hole(s) All is normal but did not see perfect resolution at high mag. Will revisit this situation during my SEM practicum class tomorrow. Unsure if this was intentional or an accident by the last user. But he was not having difficulties this afternoon when I came into the lab From jwc at snf.stanford.edu Sun Dec 23 09:17:07 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:17:07 -0000 Subject: Comment sem4160 SNF 2012-12-12 11:34:05: optimized the column and aperture alignments Message-ID: <22185277.1.1355340847086.JavaMail.coral@shine> at 5 KV I went through each section on the column. Column is now well aligned and offers exceptional resolution and performance for an anolog tool. 5kV 5 mm WD aperature strip No 4 ( smallest movable aperture) resolution is 3 to 4 nm on silicon AFM tapping mode cantilever. USERS ARE REMINDED TO PLEASE NOT TRANSLATE THE MOVABLE APERTURE STIP VERY FAR FROM ITS SET POSITIONS. IF YOU ARE HAVING TROUBLES PLEASE CONSULT WITH ANY EXPERIENCED OPERATOR, OR YOUR FAVORITE BEAM TOOLS STAFF MEMBER JWC From jwc at snf.stanford.edu Thu Dec 20 12:11:35 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Thu, 20 Dec 2012 20:11:35 -0000 Subject: [sem4160-pcs] Shutdown sem4160 SNF 2012-12-20 12:11:34: holiday shutdown Message-ID: <380480.5.1356034294990.JavaMail.coral@shine>