Problem sem4160 SNF 2012-07-31 12:44:05: couldn't get sample out

qran at snf.stanford.edu qran at snf.stanford.edu
Tue Jul 31 12:44:06 PDT 2012


I followed the shutdown steps. At step9, pressed AIR button, but the chamber door didn't open automatically. Please put my wafee on the table. Thanks.




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