From hsyoon at snf.stanford.edu Wed Jun 27 10:01:41 2012 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Wed, 27 Jun 2012 10:01:41 -0700 Subject: Problem sem4160 SNF 2012-06-27 10:01:41: could not find beam Message-ID: From jwc at snf.stanford.edu Wed Jun 27 10:05:25 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Wed, 27 Jun 2012 10:05:25 -0700 Subject: Problem sem4160 SNF 2012-06-27 10:01:41: could not find beam Message-ID: From hirotsu at snf.stanford.edu Thu Jun 28 12:10:39 2012 From: hirotsu at snf.stanford.edu (hirotsu at snf.stanford.edu) Date: Thu, 28 Jun 2012 12:10:39 -0700 Subject: Problem sem4160 SNF 2012-06-28 12:10:39: maintenance working on machine Message-ID: Maintenance is currently working on the machine. From tberg at snf.stanford.edu Thu Jun 28 12:12:38 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 28 Jun 2012 12:12:38 -0700 Subject: Shutdown sem4160 SNF 2012-06-28 12:12:37: arm stuck Message-ID: From tberg at snf.stanford.edu Thu Jun 28 13:28:26 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 28 Jun 2012 13:28:26 -0700 Subject: Comment sem4160 SNF 2012-06-28 13:28:26: load rod is bent Message-ID: trying to find a replacement From tberg at snf.stanford.edu Fri Jun 29 14:06:57 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Jun 2012 14:06:57 -0700 Subject: Problem sem4160 SNF 2012-06-28 12:10:39: maintenance working on machine Message-ID: Vented chamber, removed wafer carrier, removed loading rod and had it straightened. Reinstalled and tested transfer several times no problem image looks OK also From tberg at snf.stanford.edu Fri Jun 29 14:07:08 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Jun 2012 14:07:08 -0700 Subject: Shutdown sem4160 SNF 2012-06-28 12:12:37: arm stuck Message-ID: Vented chamber, removed wafer carrier, removed loading rod and had it straightened. Reinstalled and tested transfer several times no problem image looks OK also From tberg at snf.stanford.edu Fri Jun 29 14:07:16 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Jun 2012 14:07:16 -0700 Subject: Comment sem4160 SNF 2012-06-28 13:28:26: load rod is bent Message-ID: Vented chamber, removed wafer carrier, removed loading rod and had it straightened. Reinstalled and tested transfer several times no problem image looks OK also From coop at snf.stanford.edu Fri Jun 29 15:54:29 2012 From: coop at snf.stanford.edu (coop at snf.stanford.edu) Date: Fri, 29 Jun 2012 15:54:29 -0700 Subject: Problem sem4160 SNF 2012-06-29 15:54:29: no signal after beam alignment Message-ID: had a signal until I aligned the beam (which was way off)--from then on no signal, despite good extract current From kyunglok at snf.stanford.edu Sat Jun 30 00:00:58 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 30 Jun 2012 00:00:58 -0700 Subject: Problem sem4160 SNF 2012-06-30 00:00:58: Machine becomes very unstable Message-ID: Checked the beam misalignment might be done by previous users. And sooner realized that not only beam was misaligned, but the aperture was also heavily misaligned. Even worse, the machine was really unstable. It lost its beam three times for less than five minutes. Finally, decided not to use the machine until it was fixed. The machine might need to get maintenance. And for users: Please do not change the beam alignment setup if you are not 100% sure that you can handle it. This is one of the critical manipulations of this SEM. This strong suggestion also applies to the aperture alignment. They are correlated to each other. If one is changed, then the other need to be calibrated. From jwc at snf.stanford.edu Sat Jun 30 14:12:34 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Sat, 30 Jun 2012 14:12:34 -0700 Subject: Problem sem4160 SNF 2012-06-29 15:54:29: no signal after beam alignment Message-ID: This user needs to practice how to align the gun and then the aperture. I just aligned everything before wednesday class and it was superb. Will reiterate this with several users again.