Problem sem4160 SNF 2012-06-28 12:10:39: maintenance working on machine

tberg at tberg at
Fri Jun 29 14:06:57 PDT 2012

Vented chamber, removed wafer carrier, removed loading rod and had
it straightened. Reinstalled and tested transfer several times no problem image looks OK also

More information about the sem4160-pcs mailing list