Problem sem4160 SNF 2012-06-28 12:10:39: maintenance working on machine
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Fri Jun 29 14:06:57 PDT 2012
Vented chamber, removed wafer carrier, removed loading rod and had
it straightened. Reinstalled and tested transfer several times no problem image looks OK also
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