Problem sem4160 SNF 2012-06-30 00:00:58: Machine becomes very unstable

kyunglok at kyunglok at
Sat Jun 30 00:00:58 PDT 2012

Checked the beam misalignment might be done by previous users. And sooner realized that not only beam was misaligned, but the aperture was also heavily misaligned. Even worse, the machine was really unstable. It lost its beam three times for less than five minutes. Finally, decided not to use the machine until it was fixed. The machine might need to get maintenance. 
And for users: Please do not change the beam alignment setup if you are not 100% sure that you can handle it. This is one of the critical manipulations of this SEM. This strong suggestion also applies to the aperture alignment. They are correlated to each other. If one is changed, then the other need to be calibrated.

More information about the sem4160-pcs mailing list