From jwc at snf.stanford.edu Mon Mar 5 17:00:39 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 5 Mar 2012 17:00:39 -0800 Subject: Problem sem4160 SNF 2012-03-05 17:00:39: Satge crash on loading Message-ID: Pallet traveled beyond the clamps and I pusheed it off the end of the rack vented to air through the SEC valve and attempting to now rehome X motor with errored E1 and then movee to sense and rehome it... trying to pump dow2n sys and SEChambers with SEC valve closed... JWC From jwc at snf.stanford.edu Mon Mar 5 18:19:52 2012 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Mon, 5 Mar 2012 18:19:52 -0800 Subject: Shutdown sem4160 SNF 2012-03-05 18:19:52: could not load sample holder Message-ID: vented SC and removed sample holder manually. replaced into the SEC and onto the SEC transfer arm rod. Pumped down system through the SEC closing door after reaching high vacuum. Could not get Tilt axis to rehome despite several tries manually rotating the Tilt axis motor. reset display power several times in effort to clear the stage errors. shuting down tool till Ted berg can take a look at it. JWC From tberg at snf.stanford.edu Tue Mar 6 12:37:57 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:37:57 -0800 Subject: Problem sem4160 SNF 2012-03-05 17:00:39: Satge crash on loading Message-ID: REhomed all axis, checked for image on stage looked OK, removed platen from chamber From tberg at snf.stanford.edu Tue Mar 6 12:38:05 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 6 Mar 2012 12:38:05 -0800 Subject: Shutdown sem4160 SNF 2012-03-05 18:19:52: could not load sample holder Message-ID: REhomed all axis, checked for image on stage looked OK, removed platen from chamber From coop at snf.stanford.edu Sun Mar 11 13:31:22 2012 From: coop at snf.stanford.edu (coop at snf.stanford.edu) Date: Sun, 11 Mar 2012 13:31:22 -0700 Subject: Problem sem4160 SNF 2012-03-11 13:31:21: Wafer stuck in SEM Message-ID: Unable to get a signal 11Mar12 13:26, but transport worked. Shut off Display power and repowered. Stage moved to X0 Y150 and gave E4 error. Unable to retrieve wafer. Left wafer carrier in Ziplok bag. From tberg at snf.stanford.edu Mon Mar 12 07:45:34 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Mar 2012 07:45:34 -0700 Subject: Problem sem4160 SNF 2012-03-11 13:31:21: Wafer stuck in SEM Message-ID: Rehomed all axis, checked image OK. Removed sample to box in ziplock bag From cmcg at snf.stanford.edu Sun Mar 25 18:02:13 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 25 Mar 2012 18:02:13 -0700 Subject: Shutdown sem4160 SNF 2012-03-25 18:02:12: SEC chamber vaccum stuck at 50pa Message-ID: worked fine for one wafer, then not for the next. I tried cleaning off the carbon dots and cleaned the stage, let it pump for 1hr, still red. From cmcg at snf.stanford.edu Sun Mar 25 19:19:00 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 25 Mar 2012 19:19:00 -0700 Subject: Comment sem4160 SNF 2012-03-25 19:19:00: cleaned door, pumped down now.... Message-ID: I shouldn't have shut it down, woops From tberg at snf.stanford.edu Mon Mar 26 05:53:00 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Mar 2012 05:53:00 -0700 Subject: Shutdown sem4160 SNF 2012-03-25 18:02:12: SEC chamber vaccum stuck at 50pa Message-ID: shutdown in error From tberg at snf.stanford.edu Mon Mar 26 05:53:12 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Mar 2012 05:53:12 -0700 Subject: Comment sem4160 SNF 2012-03-25 19:19:00: cleaned door, pumped down now.... Message-ID: shutdown in error From jackson at snf.stanford.edu Sat Mar 31 20:21:22 2012 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Sat, 31 Mar 2012 20:21:22 -0700 Subject: Comment sem4160 SNF 2012-03-31 20:21:21: computer software Message-ID: The image software was locking up the computer often during my session...finally had to reboot the computer and then there gave a symtec error message...