Problem sem4160 SNF 2012-03-11 13:31:21: Wafer stuck in SEM

coop at coop at
Sun Mar 11 13:31:22 PDT 2012

Unable to get a signal 11Mar12 13:26, but transport worked.
Shut off Display power and repowered.  Stage moved to X0 Y150 and gave E4 error.  Unable to retrieve wafer.  Left wafer carrier in Ziplok bag.

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