Problem sem4160 SNF 2012-03-11 13:31:21: Wafer stuck in SEM

coop at snf.stanford.edu coop at snf.stanford.edu
Sun Mar 11 13:31:22 PDT 2012


Unable to get a signal 11Mar12 13:26, but transport worked.
Shut off Display power and repowered.  Stage moved to X0 Y150 and gave E4 error.  Unable to retrieve wafer.  Left wafer carrier in Ziplok bag.




More information about the sem4160-pcs mailing list