Shutdown sem4160 SNF 2012-03-25 18:02:12: SEC chamber vaccum stuck at 50pa

cmcg at snf.stanford.edu cmcg at snf.stanford.edu
Sun Mar 25 18:02:13 PDT 2012


worked fine for one wafer, then not for the next. I tried cleaning off the carbon dots and cleaned the stage, let it pump for 1hr, still red.




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