Problem semhitachi 2003-07-07 00:14:43: Report Problem for semhitachi

charley charley at snf.stanford.edu
Mon Jul 7 08:56:54 PDT 2003



    Yup, it has a problem pumping. I'm working on it at the current time,
and hope it will give up and work today. The recently rebuilt pump I
am using has a nice scratch all the way across the seal surface, so I
need to fix that as well. Watch for updates on the semhitachi and sem4160
mail aliases, as there is no mail alias for the hummer.
    chw3

schaper at snf.stanford.edu wrote:

> Sputter tool - Technics Hummer V - possible problem pulling sufficient vacuum




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