From jwc at snf.stanford.edu Thu Apr 9 09:54:35 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 09 Apr 2009 09:54:35 -0700 Subject: Comment sem4160 SNF 2009-04-09 09:28:23: current dropping monotonically... Message-ID: <49DE284B.7020106@snf.stanford.edu> Greetings: This is completely normal and most Users will experience this in the first hour of two of operations. If you see that the extraction voltage exceeds 6.2 kV go ahead and shut down the acceleration voltage and flash the tip. If the resulting flash emission current is 25 uA or below go ahead and flash again. Of course the best thing we can do with all Field Emission ebeam tools is to run the tool continuously! If you have continued problems or the beam is tripping off please contact me directly. All the Best, JWC dalyx at snf.stanford.edu wrote: > Seems like the current drops over time. Used 20keV, was getting 12uA at first, but then drops monotonically until 8uA. Flashing didn't seem to solve the problem, however setting Vacc again resets the current to higher values. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Apr 21 08:50:37 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 21 Apr 2009 08:50:37 -0700 Subject: Problem sem4160 SNF 2009-04-20 22:14:23: can't see anything Message-ID: <49EDEB4D.5090400@snf.stanford.edu> Users are reminded NOT TO make adjustments to the Beam Monitor Movable aperture strip in the upper section of the column... Users are suggested to start out at the acceleration voltage last used to confirm the beam is in alignment before changing settings on the tool. I will take a look at this at 9:30 AM and check out the system. Thank you, James Conway rostam at snf.stanford.edu wrote: > after inserting the sample and closing the valve, there was a hissing sound. I unloded the sample and loaded again the hissing sound stopped. > However, I couldn't see anything. even at highest brightness the image is completely dark. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Apr 22 18:14:42 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 22 Apr 2009 18:14:42 -0700 Subject: question on SEM4160 use... In-Reply-To: <004001c9c370$cb635d10$622a1730$@com> References: <004001c9c370$cb635d10$622a1730$@com> Message-ID: <49EFC102.3050605@snf.stanford.edu> Great question! I am not sure what note this may be but I will review the web site tomorrow. Likely this was an erroneous statement lost in translation but likely was a item about the contamination class of the tool. All Litho and Ebeam tools are considered to be in the Gold Contaminated Equipment group. But in normal usage they will not contaminate your wafer will any metal. The only element you are likely to deposit on your wafers is Carbon from hydrocarbons. (HC) This is from an Ebeam induced deposition during the ebeam exposure onto your samples by cracking virtual sources of HC's from the chamber walls and any polymer, resist, or solvent residues that may be on your wafer. Users may place any metal or substrate materials into the 4160 system as long as they do not contain Grease, hydrocarbon based waxes, lubricants particularly Silicone lubes, or graphite. All materials should be soft baked before placing into any Beam tool to reduce the out-gassing load to the specimen chamber. If you wish to examine biological samples, tissues, bone, bugs, or anything that is likely to out gas greatly it is suggested to employ the semhitachi for this type of imaging. Thank you for a great question! James Conway Robert Huang wrote: > > Hi James, > > > > A question for you on the SEM4160 -- is it OK if my samples have some > patterns with ~75nm thick Au? I saw a note on the SNF website that > said samples with Au should not be put into this system. > > > > Regards, > > > > Robert Huang > > Director, Process and Device Technology > > QuSwami, Inc. > > 505 Montgomery Street, Suite 300 > > San Francisco, CA 94111-6531 > > W: (415) 834-9910 > > M: (408) 854-0450 > > F: (415) 834-9975 > > roberth at quswami.com > > > > > > **********************Privacy and Confidentiality > Notice********************** > > The information contained in this communication is confidential and > may be privileged. It is intended solely for the use of the individual > or entity to whom it is addressed and others authorized to receive it. > If you are not the intended recipient, you are hereby notified that > any disclosure, copying, distribution or taking any action in reliance > to the contents of this information is strictly prohibited. > > ****************************************************************************** > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Fri Apr 24 08:57:09 2009 From: jwc at snf.stanford.edu (James Conway) Date: Fri, 24 Apr 2009 08:57:09 -0700 Subject: Problem sem4160 SNF 2009-04-23 20:16:03: image moving Message-ID: <49F1E155.1040601@snf.stanford.edu> Good Morning Users: If you are not slow, gentle, and kind in your translations of this older SEM stage it will induce backlash and binding of the sliders that control the X-Y axis. It is recommended for smooth uniform motion and not to have tension resulting in shifting of your image to initially start the motion very slowly and then once you observe motion only then accelerate to speed. Subsequently if you still see the stage moving in small increments just gently move back and forth a very small amount on that axis to remove the tension... This is very common practice in the older Hitachi and other SEM manufactured during that era. If you still have problems please make an appointment with me. The next time we open the Specimen Chamber to air for maintenance we will check the stage motion out and adjust the mechanical adjustments on this stage. Thank you for you Coral Problem report. James Conway rostam at snf.stanford.edu wrote: > The image on the monitor is moving/shifting to the right constantly > > -------------- next part -------------- An HTML attachment was scrubbed... URL: