From molinj1 at umbc.edu Tue Aug 4 13:11:02 2009 From: molinj1 at umbc.edu (Jamal L. Molin) Date: Tue, 4 Aug 2009 16:11:02 -0400 (EDT) Subject: Reservation from 1pm - 4pm Canceled Message-ID: <4517.171.64.100.247.1249416662.squirrel@webmail.umbc.edu> My reservation from 1pm - 4pm is canceled. That time is now open. Thanks, Jamal Jamal Molin UMBC 2011 Computer Engineering Major Meyerhoff Scholar (M-19) From jwc at snf.stanford.edu Tue Aug 18 09:40:45 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 18 Aug 2009 09:40:45 -0700 Subject: Scale Bar Calibration In-Reply-To: <740114315.74811249860565574.JavaMail.root@zm03.stanford.edu> References: <740114315.74811249860565574.JavaMail.root@zm03.stanford.edu> Message-ID: <4A8AD98D.1080600@snf.stanford.edu> Hello Matt and /semhitachi /and/ sem4160/ Users: Both of our SEMs are calibrated to a NIST traceable line width standard using Geller MRS3 ebeam written calibration chip. The value you measure on either SEM is within 0.5 % in X plane and within +- 1.0 or less in Y plane. This calibration is checked every other month at 100, 1000, and 100,000X magnification. Please see me if yo have questions or would like to join me for a calibration and metrology session with me. Thank you, James Matthew W. Messana wrote: > Has anyone compared the scale bar on semhitachi images to a known sample dimension? I'm looking to measure a 5um film and am curious whether or not I can trust the scale bar. > > Thanks, > Matt > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Aug 19 09:09:53 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 19 Aug 2009 09:09:53 -0700 Subject: ALL USERS: Please be careful in your operations on the tool. Message-ID: <4A8C23D1.2090806@snf.stanford.edu> Good Morning SEM4160 Users, Users are requested to be more careful during operations on SEM4160 with regards to mechanical translation to the movable aperture settings. Recently users coming onto the system are discovering the movable aperture strip controls have been translated beyond the normal range of motion, and the ebeam is no longer impinging through any aperture. This results in a dim image and little to no acceptable resolution. Other times users are encountering the beam alignment itself is far off center and they cannot obtain an initial SEM image coming onto the system. While we make every effort to ensure that all Users qualified to use the tool have been trained to find and align the emission spot for gun alignment, and align the movable apertures for aperture alignment; some users trained in the past may not have had these specific items covered in detail. Users whom have been away from the tool for some time may simply need a refresher on the SEM4160 operations. My next SEM4160 training session is scheduled for next Wednesday August 26th, 2009 from 10 - 12:30 AM. All interested parties are welcome to attend any all or part of this training. Finally I would like to remind everyone, when working on any tool at SNF, that should you ever become unsure about an operations procedure, become concerned, worried, or even terrified on any tool -- simply stop what you are doing and seek out that assistance of any experienced qualified user or SNF staff member whom will be happy to assist you. Thank you for your support! James Conway -------- Original Message -------- Subject: Problem sem4160 SNF 2009-08-18 17:36:37: aperture strip misaligned mechanicaly to the selection numbers Date: Tue, 18 Aug 2009 17:36:37 -0700 From: jwc at snf.stanford.edu To: sem4160-pcs at snf.stanford.edu New User issues from user working over the weekend... the movable aperture strip is misaligned mechanically to the selection numbers and is not going through any hole nor can I find them. Ted may be more successful in finding the holes or the strip may be replaced. Users are requested to not force or run out the alignment knobs to or beyond the mechanical stops. Currently we do not have any suitable resolution for imaging on this tool. JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Thu Aug 20 10:01:18 2009 From: jwc at snf.stanford.edu (James Conway) Date: Thu, 20 Aug 2009 10:01:18 -0700 Subject: Hummer Sputter coater now has a Pd Target installed in it. Message-ID: <4A8D815E.9060809@snf.stanford.edu> Good Morning, The Hummer Sputter coater now has a Pd Target installed in it replacing the Au target that had perforated. Please do not employ this system for thick film coatings -- just for sputtered films to enhance your SEM sample imaging. Thank you, James Conway -------------- next part -------------- An HTML attachment was scrubbed... URL: