Scale Bar Calibration
jwc at snf.stanford.edu
Tue Aug 18 09:40:45 PDT 2009
Hello Matt and /semhitachi /and/ sem4160/ Users:
Both of our SEMs are calibrated to a NIST traceable line width standard
using Geller MRS3 ebeam written calibration chip. The value you
measure on either SEM is within 0.5 % in X plane and within +- 1.0 or
less in Y plane. This calibration is checked every other month at 100,
1000, and 100,000X magnification.
Please see me if yo have questions or would like to join me for a
calibration and metrology session with me.
Matthew W. Messana wrote:
> Has anyone compared the scale bar on semhitachi images to a known sample dimension? I'm looking to measure a 5um film and am curious whether or not I can trust the scale bar.
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