Scale Bar Calibration

James Conway jwc at snf.stanford.edu
Tue Aug 18 09:40:45 PDT 2009


Hello Matt and /semhitachi /and/ sem4160/ Users:

Both of our SEMs are calibrated to a NIST traceable line width standard 
using  Geller MRS3 ebeam written calibration chip.  The value you 
measure on either SEM is within 0.5 % in X plane and within +- 1.0 or 
less in Y plane.  This calibration is checked every other month at 100, 
1000, and 100,000X magnification.

Please see me if yo have questions or would like to join me for a 
calibration and metrology session with me.

Thank you,

James

Matthew W. Messana wrote:
> Has anyone compared the scale bar on semhitachi images to a known sample dimension? I'm looking to measure a 5um film and am curious whether or not I can trust the scale bar.
>
> Thanks,
> Matt
>   
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