From jwc at snf.stanford.edu Mon Sep 21 14:13:50 2009 From: jwc at snf.stanford.edu (James Conway) Date: Mon, 21 Sep 2009 14:13:50 -0700 Subject: I will be going into take a look at sem4160 at 2:30 and hopefully we can get the platform up for you... JWC Message-ID: <4AB7EC8E.2060006@snf.stanford.edu> /*sem4160 User(s):*/ I will be going into take a look at sem4160 at 2:30 and hopefully we can get the platform up for you... JWC -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Tue Sep 22 09:02:57 2009 From: jwc at snf.stanford.edu (James Conway) Date: Tue, 22 Sep 2009 09:02:57 -0700 Subject: sem4160 and microscope In-Reply-To: <00d401ca3b08$b60af8f0$2220ead0$@edu> References: <00c001ca3afc$7d7f6130$787e2390$@edu> <4AB7F579.5050200@snf.stanford.edu> <00d401ca3b08$b60af8f0$2220ead0$@edu> Message-ID: <4AB8F531.4010901@snf.stanford.edu> Someone had moved the BEAM Monitor aperture out of alignment. Easy fix just realign the Gun emission image (PF3 no 1) Best James Matthew W. Messana wrote: > > James, > > > > Thanks for taking a look at the tool. Unfortunately I'm out of the lab > for the rest of the day. I'll try and find you tomorrow to take a look > at that bulb. > > > > If you get a chance, please let me know what the fix was to get an > image on the tool... > > > > Thanks, > Matt > > > > *From:* James Conway [mailto:jwc at snf.stanford.edu] > *Sent:* Monday, September 21, 2009 2:52 PM > *To:* Matthew W. Messana > *Subject:* Re: sem4160 and microscope > > > > See me when I am in the lab... to show you the bad connection on the > microscope bulb. > > I am going in now to take a look at the sem4160 > > Hope you next session goes better > > JWC > > > Matthew W. Messana wrote: > > Hi James, > > > > I tried using the sem4160 today, but for some reason couldn't get an > image. The screen wasn't completely black, which I think would > indicate that the aperture was not aligned properly. I just couldn't > focus on anything, not even the stage. The Vext seemed to be high and > the system had a hard time maintaining the beam current (odd thing > that it was set to 12uA, but I never saw it go above 10uA). Any > thoughts on what might be the problem? > > > > Also the microscope n the E-beam room seems to have a burned out bulb. > I'm not too experienced using that thing, so there may be some lever > to push or pull to get the thing to light up, but despite mine, > andrew's and a couple other people we found in the lab's best effort, > we could not see anything. Any thoughts here? > > > > Thanks, > Matt > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwc at snf.stanford.edu Wed Sep 23 16:33:18 2009 From: jwc at snf.stanford.edu (James Conway) Date: Wed, 23 Sep 2009 16:33:18 -0700 Subject: Hummer Jr. is now offline for a week or two due to a bad mechancial pump. Anyone know of another sputter coater available at SU? Message-ID: <4ABAB03E.6080701@snf.stanford.edu> Greetings Everyone: Our SNF Hummer Jr. SEM sample sputter coater is now off- line for a week or two due to a bad mechanical pump. It has been sent out for repairs. Anyone know of another sputter coater available at SU for coating SEM and EBL samples? Normally small pieces of wafers but sometimes up to 100 mm (4") wafers. RSVP to jwc at snf.stanford.edu or REPLY to ALL. James Conway SNF Ebeam Lab -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 30 07:52:16 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 30 Sep 2009 07:52:16 -0700 Subject: Hummer Jr Is Back on line Message-ID: <4AC370A0.5000209@stanford.edu> Hello All, Hummer Jr Is Back on line. Mech pump is back from rebuild and is pumping fine. ted h