sem4160 and microscope

James Conway jwc at snf.stanford.edu
Tue Sep 22 09:02:57 PDT 2009


Someone had moved the BEAM Monitor aperture out of alignment.  Easy fix 
just realign the Gun emission image (PF3 no 1)

Best

James

Matthew W. Messana wrote:
>
> James,
>
>  
>
> Thanks for taking a look at the tool. Unfortunately I'm out of the lab 
> for the rest of the day. I'll try and find you tomorrow to take a look 
> at that bulb.
>
>  
>
> If you get a chance, please let me know what the fix was to get an 
> image on the tool...
>
>  
>
> Thanks,
> Matt
>
>  
>
> *From:* James Conway [mailto:jwc at snf.stanford.edu]
> *Sent:* Monday, September 21, 2009 2:52 PM
> *To:* Matthew W. Messana
> *Subject:* Re: sem4160 and microscope
>
>  
>
> See me when I am in the lab... to show you the bad connection on the 
> microscope bulb.
>
> I am going in now to take a look at the sem4160
>
> Hope you next session goes better
>
> JWC
>
>
> Matthew W. Messana wrote:
>
> Hi James,
>
>  
>
> I tried using the sem4160 today, but for some reason couldn't get an 
> image. The screen wasn't completely black, which I think would 
> indicate that the aperture was not aligned properly. I just couldn't 
> focus on anything, not even the stage. The Vext seemed to be high and 
> the system had a hard time maintaining the beam current (odd thing 
> that it was set to 12uA, but I never saw it go above 10uA). Any 
> thoughts on what might be the problem?
>
>  
>
> Also the microscope n the E-beam room seems to have a burned out bulb. 
> I'm not too experienced using that thing, so there may be some lever 
> to push or pull to get the thing to light up, but despite mine, 
> andrew's and a couple other people we found in the lab's best effort, 
> we could not see anything. Any thoughts here?
>
>  
>
> Thanks,
> Matt
>
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