Hummer Jr. is now offline for a week or two due to a bad mechancial pump. Anyone know of another sputter coater available at SU?
jwc at snf.stanford.edu
Wed Sep 23 16:33:18 PDT 2009
Our SNF Hummer Jr. SEM sample sputter coater is now off- line for a week
or two due to a bad mechanical pump. It has been sent out for repairs.
Anyone know of another sputter coater available at SU for coating SEM
and EBL samples? Normally small pieces of wafers but sometimes up to
100 mm (4") wafers.
RSVP to jwc at snf.stanford.edu or REPLY to ALL.
SNF Ebeam Lab
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