Hummer Jr. is now offline for a week or two due to a bad mechancial pump. Anyone know of another sputter coater available at SU?

James Conway jwc at snf.stanford.edu
Wed Sep 23 16:33:18 PDT 2009


Greetings Everyone:

Our SNF Hummer Jr. SEM sample sputter coater is now off- line for a week 
or two due to a bad mechanical pump.  It has been sent out for repairs.

Anyone know of another sputter coater available at SU for coating SEM 
and EBL samples?  Normally small pieces of wafers but sometimes up to 
100 mm (4") wafers.

RSVP to jwc at snf.stanford.edu or REPLY to ALL.

James Conway
SNF Ebeam Lab
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sem4160/attachments/20090923/14ce64c0/attachment.html>


More information about the sem4160 mailing list