Hummer V Sputterer Target
James W. Conway
jwc at snf.stanford.edu
Wed Apr 14 10:26:50 PDT 2010
The cathode currently in the hummer is a Pd target. It is very old but
will give good contrast in SEM images. The films can be removed with
KI:I Au anodic etch. My current plan is to run all the old targets
until they are absolutely useless before considering any replacements.
I have stopped providing new Au targets for this tool due to minority of
Users whom had used this system to coat eye ware and other non-SEM
Which metal would you prefer if I were to order a target? Note SNF does
not have any funds for these items at this time. Targets are $600 to
All the Best,
Nathan K wrote:
> I was looking to coat an SEM sample with gold using the Hummer V, but
> noticed that the target film appears to be entirely sputtered away. I
> think that people have even been sputtering the film holder, because
> everything is coated in a silver-colored metal layer rather than the
> normal gold-colored layer. Has the target been replaced with
> something other than gold, or is it possible to replace the target?
> Thank you for your help.
> Nathan Klejwa
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